(Digital Presentation) High-Dose Ion-Implanted Photoresist Stripping Technology Employing High Temperature Single-Wafer SPM System
Sasahira, Konosuke, Nakamura, Satoshi, Hamada, Koichi, Jinbo, Sadayuki, Hattori, Kei
Published in Meeting abstracts (Electrochemical Society) (07.07.2022)
Published in Meeting abstracts (Electrochemical Society) (07.07.2022)
Get full text
Journal Article
SEMICONDUCTOR DEVICE AND ITS FABRICATING METHOD
KOJIMA AKIHIRO, JINBO SADAYUKI, UOZUMI NOBUHIRO, OIWA NORIHISA, NADAHARA SOICHI
Year of Publication 11.04.2003
Get full text
Year of Publication 11.04.2003
Patent
CHEMICAL DRY ETCHING
JINBO SADAYUKI, MUTO MAKOTO, SATO KOICHI, YOSHIDA YUKIMASA, TAZAWA YASUSHI
Year of Publication 15.12.2000
Get full text
Year of Publication 15.12.2000
Patent
DRY ETCHING METHOD
JINBO SADAYUKI, YOSHIMORI HIROAKI, HATTORI KEI, MUTO MAKOTO, KOBAYASHI AKIRA, NONAKA MIKIO, ONODA TOSHIYASU, KASAI MASARU
Year of Publication 30.05.2000
Get full text
Year of Publication 30.05.2000
Patent
MANUFACTURE OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE
HORIOKA KEIJI, OKANO HARUO, JINBO SADAYUKI, HORI MASARU, YANO HIROYUKI
Year of Publication 09.04.1993
Get full text
Year of Publication 09.04.1993
Patent