Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
Sahir, Samrina, Yerriboina, Nagendra Prasad, Han, So-Young, Han, Kwang-Min, Kim, Tae-Gon, Mahadev, Niraj, Park, Jin-Goo
Published in Applied surface science (15.04.2021)
Published in Applied surface science (15.04.2021)
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Journal Article
Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates
Kim, Hyuk-Min, Manivannan, R., Moon, Deog-Ju, Xiong, Hailin, Park, Jin-Goo
Published in Wear (01.04.2013)
Published in Wear (01.04.2013)
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Journal Article
Conference Proceeding
Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant
Sahoo, Bichitra Nanda, Han, So Young, Kim, Hyun-Tae, Ando, Keita, Kim, Tae-Gon, Kang, Bong-Kyun, Klipp, Andreas, Yerriboina, Nagendra Prasad, Park, Jin-Goo
Published in Ultrasonics sonochemistry (01.01.2022)
Published in Ultrasonics sonochemistry (01.01.2022)
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Journal Article
Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process
Lee, Jung-Hwan, Poddar, Maneesh Kumar, Han, Kwang-Min, Ryu, Heon-Yul, Yerriboina, Nagendra Prasad, Kim, Tae-Gon, Wada, Yutaka, Hamada, Satomi, Hiyama, Hirokuni, Park, Jin-Goo
Published in Polymer testing (01.10.2020)
Published in Polymer testing (01.10.2020)
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Journal Article
Nanocatalyst-induced hydroxyl radical (·OH) slurry for tungsten CMP for next-generation semiconductor processing
Poddar, Maneesh Kumar, Ryu, Heon-Yul, Yerriboina, Nagendra Prasad, Jeong, Yeon-Ah, Lee, Jung-Hwan, Kim, Tae-Gon, Kim, Jae-Hyun, Park, Jong-Dai, Lee, Min-Gun, Park, Chang-Yong, Han, Seong-Jun, Choi, Jae-Gon, Park, Jin-Goo
Published in Journal of materials science (01.03.2020)
Published in Journal of materials science (01.03.2020)
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Journal Article
Study on possible root causes of contamination from an incoming PVA brush during post-CMP cleaning
Lee, Jung-Hwan, Purushothaman, Muthukrishnan, Han, Kwang-Min, Ryu, Heon-Yul, Yerriboina, Nagendra Prasad, Kim, Tae-Gon, Wada, Yutaka, Hamada, Satomi, Hiyama, Hirokuni, Park, Jin-Goo
Published in Polymer testing (01.08.2019)
Published in Polymer testing (01.08.2019)
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Journal Article
Characterization of non-amine-based post-copper chemical mechanical planarization cleaning solution
Manivannan, Ramachandran, Cho, Byoung-Jun, Hailin, Xiong, Ramanathan, Srinivasan, Park, Jin-Goo
Published in Microelectronic engineering (25.06.2014)
Published in Microelectronic engineering (25.06.2014)
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Journal Article
Conference Proceeding
On the mechanism of material removal by fixed abrasive lapping of various glass substrates
Cho, Byoung-Jun, Kim, Hyuk-Min, Manivannan, R., Moon, Deog-Ju, Park, Jin-Goo
Published in Wear (01.04.2013)
Published in Wear (01.04.2013)
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Journal Article
Conference Proceeding
Characterization of TMAH based cleaning solution for post Cu-CMP application
Prasanna Venkatesh, R., Kwon, Tae-Young, Nagendra Prasad, Y., Ramanathan, S., Park, Jin-Goo
Published in Microelectronic engineering (01.02.2013)
Published in Microelectronic engineering (01.02.2013)
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Journal Article
Conference Proceeding
Characterization of Free-Standing Nano-Membranes by Using Ellipsometry
Park, Sungmo, Lee, Changho, An, Ilsin, Kim, Min-Su, Park, Jin-Goo, Ahn, Jin-ho
Published in Journal of the Korean Physical Society (01.04.2018)
Published in Journal of the Korean Physical Society (01.04.2018)
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Journal Article
Fabrication of Stainless Steel Metal Mask with Electrochemical Fabrication Method and Its Improvement in Dimensional Uniformity
Ryu, Heon-Yul, Kim, Myeong-Jun, Yerriboina, Nagendra Prasad, Srinivasan, Ramanathan, Park, Jin-Goo
Published in Electronic materials letters (01.01.2019)
Published in Electronic materials letters (01.01.2019)
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Journal Article
Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime
Ryu, Heon-Yul, Kim, Ji-Woo, Hyun, Da-Bin, Kim, Yeo-Ho, Lee, Jung-Hwan, Park, Jin-Goo
Published in Electronic materials letters (01.05.2019)
Published in Electronic materials letters (01.05.2019)
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Journal Article
Self-assembled monolayer modified MoO3/Au/MoO3 multilayer anodes for high performance OLEDs
Jeong, Daekyun, Lim, Chefwi, Kim, Myeonggi, Jeong, Kyunghoon, Kim, Jae-Hun, Kim, Jiyoung, Park, Jin-Goo, Min, Kyeong-Sik, Lee, Jaegab
Published in Electronic materials letters (2017)
Published in Electronic materials letters (2017)
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Journal Article
Investigation of cu-BTA complex formation during Cu chemical mechanical planarization process
Cho, Byoung-Jun, Shima, Shohei, Hamada, Satomi, Park, Jin-Goo
Published in Applied surface science (30.10.2016)
Published in Applied surface science (30.10.2016)
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Journal Article