Making method for large-area 3C-SiC thin film of MEMS part
LIU XINGFANG, WANG LEI, ZHAO WANSHUN, ZENG YIPING, LI JIAYE, SUN GUOSHENG, LI JINMIN, ZHAO YONGMEI
Year of Publication 15.07.2009
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Year of Publication 15.07.2009
Patent
Rotating device for silicon carbide epitaxial growth heater
WANG LEI, LIU XINGFANG, ZHAO WANSHUN, LI JIAYE, SUN GUOSHENG, ZHAO YONGMEI
Year of Publication 02.01.2008
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Year of Publication 02.01.2008
Patent
Silicone base 3C-silicon carbide heteroepitaxy growth method based on aluminum nitride buffer layer
LIU XINGFANG, WANG LEI, ZHAO WANSHUN, ZENG YIPING, LI JIAYE, SUN GUOSHENG, ZHAO YONGMEI, LI JINMIN
Year of Publication 08.10.2008
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Year of Publication 08.10.2008
Patent
Making method for large-area 3C-SiC thin film of MEMS part
LIU XINGFANG, WANG LEI, ZHAO WANSHUN, ZENG YIPING, LI JIAYE, SUN GUOSHENG, LI JINMIN, ZHAO YONGMEI
Year of Publication 26.03.2008
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Year of Publication 26.03.2008
Patent