Vacuum chuck, substrate processing apparatus including the same and related method of manufacture
Han, Donghoon, Kim, Minjoon, Uh, Jiho, Ji, Byounghoon, Bae, Jongyong, Maeng, Seoyoung, Lim, Hongtaek
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Year of Publication 18.10.2022
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Gas supply and layer deposition apparatus including the same
Han, Donghoon, Kim, Minjoon, Ji, Byounghoon, Bae, Jongyong, Maeng, Seoyoung, Lee, Kyuho
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Year of Publication 11.01.2022
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VACUUM CHUCK, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME AND RELATED METHOD OF MANUFACTURE
Han, Donghoon, Kim, Minjoon, Uh, Jiho, Ji, Byounghoon, Bae, Jongyong, Maeng, Seoyoung, Lim, Hongtaek
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Year of Publication 11.03.2021
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GAS SUPPLY AND LAYER DEPOSITION APPARATUS INCLUDING THE SAME
Han, Donghoon, Kim, Minjoon, Ji, Byounghoon, Bae, Jongyong, Maeng, Seoyoung, Lee, Kyuho
Year of Publication 04.03.2021
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Year of Publication 04.03.2021
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