by Andresen, Kristian Ødegaard, Hansen, Morten, Matschuk, Maria, Jepsen, Søren Terpager, Sørensen, Henrik Schiøtt, Utko, Pawel, Selmeczi, Dávid, Hansen, Thomas S, Larsen, Niels B, Rozlosnik, Noemi, Taboryski, Rafael
Published in Journal of micromechanics and microengineering (01.05.2010)