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Year of Publication 19.12.2017
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Year of Publication 29.12.2016
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Year of Publication 14.07.2016
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Substrate manufacturing method and substrate manufacturing apparatus
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Year of Publication 31.05.2016
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SUBSTRATE MANUFACTURING METHOD AND SUBSTRATE MANUFACTURING APPARATUS
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Year of Publication 28.01.2016
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Plasma confinement ring, semiconductor manufacturing apparatus, and semiconductor device manufacturing method
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Year of Publication 01.11.2022
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Year of Publication 01.11.2022
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