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Induction plasma processing chamber
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Method and apparatus for generating high-density uniform plasma
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Year of Publication 01.11.2001
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Selbstausrichtender Kontakt und Herstellungsverfahren dafür
Yeh, Jeng-Ya David, Yeh, Chih Chieh, Lee, Tung Ying, Yeo, Yee-Chia, Chiu, Yuan-Hung, Liu, Chi-Wen
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
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METHODS OF INTEGRATING MULTIPLE GATE DIELECTRIC TRANSISTORS ON A TRI-GATE (FINFET) PROCESS
YEH JENG-YA DAVID, TSAI CURTIS, PARK JOODONG, JAN CHIA-HONG, HAFEZ WALID M
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