Impact of interface variations on J-V and C-V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1-x)AlxO2 films
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Published in Microelectronic engineering (01.07.2009)
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Impact of interface variations on @@iJ@-@@iV@ and @@iC@-@@iV@ polarity asymmetry of MIM capacitors with amorphous and crystalline Zr@@d(1-@@@i@@dx@@@@d)@Al@@i@@dx@@O@@d2@ films
Weinreich, W, Reiche, R, Lemberger, M, Jegert, G, Mueller, J, Wilde, L, Teichert, S, Heitmann, J, Erben, E, Oberbeck, L, Schroeder, U, Bauer, A J, Ryssel, H
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Published in Microelectronic engineering (01.09.2009)
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Impact of interface variations on J–V and C–V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1−)Al O2 films
Weinreich, W., Reiche, R., Lemberger, M., Jegert, G., Müller, J., Wilde, L., Teichert, S., Heitmann, J., Erben, E., Oberbeck, L., Schröder, U., Bauer, A.J., Ryssel, H.
Published in Microelectronic engineering (01.07.2009)
Published in Microelectronic engineering (01.07.2009)
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Journal Article
Impact of interface variations on J– V and C– V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr (1− x )Al x O 2 films
Weinreich, W., Reiche, R., Lemberger, M., Jegert, G., Müller, J., Wilde, L., Teichert, S., Heitmann, J., Erben, E., Oberbeck, L., Schröder, U., Bauer, A.J., Ryssel, H.
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Published in Microelectronic engineering (2009)
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