A CMOS Compatible Ultrasonic Transducer Fabricated With Deep Reactive Ion Etching
Rufer, L., Domingues, C.C., Mir, S., Petrini, V., Jeannot, J.-C., Delobelle, P.
Published in Journal of microelectromechanical systems (01.12.2006)
Published in Journal of microelectromechanical systems (01.12.2006)
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Journal Article
P4M-1 Design, Fabrication and Characterisation of Capacitive Micro-Machined Ultrasonic Transducers Based on a 2D-Like Architecture
Clatot, S., Blind, P., Petrini, V., Gauthier-Manuel, L., Jeannot, J.C., Ballandras, S.
Published in 2007 IEEE Ultrasonics Symposium Proceedings (01.10.2007)
Published in 2007 IEEE Ultrasonics Symposium Proceedings (01.10.2007)
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Conference Proceeding
Microconnectors for the passive alignment of optical waveguides and ribbon optical fibers
Kaou, N., Armbruster, V., Jeannot, J.C., Mollier, P., Porte, H., Devoldere, N., De Labachelerie, M.
Published in Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) (2000)
Published in Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) (2000)
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Conference Proceeding
Design, fabrication and characterisation of capacitive micro-machined ultrasonic transducers based on a 2d-like architecture
Clatot, S., Blind, P., Petrini, V., Gauthier-Manuel, L., Wilm, M., Jeannot, J.C., Ballandras, S., Berriet, R.
Published in IEEE Ultrasonics Symposium, 2005 (2005)
Published in IEEE Ultrasonics Symposium, 2005 (2005)
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Conference Proceeding