Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators
Torri, G B, Janssen, N M A, Zeng, Z, Rottenberg, X, Karabacak, D M, Vandecasteele, M, Hoof, C Van, Puers, R, Tilmans, H A C
Published in Journal of micromechanics and microengineering (01.08.2014)
Published in Journal of micromechanics and microengineering (01.08.2014)
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