LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING LITHOGRAPHIC APPARATUS
MIRANDA MARCIO ALEXANDRE CANO, NOORDAM LAMBERTUS DOMINICUS, JANSEN HANS, JORRITSMA LAURENTIUS CATRINUS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, SIEBE LANDHEER, MEESTER ARNOUT JOHANNES, VAN DER LEE MAURICE MARTINUS JOHANNES
Year of Publication 06.08.2015
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Year of Publication 06.08.2015
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LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
MIRANDA MARCIO ALEXANDRE CANO, JANSEN HANS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, MEESTER ARNOUT JOHANNES, LANDHEER SIEBE
Year of Publication 25.03.2010
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Year of Publication 25.03.2010
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A CLEANING DEVICE, A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS CLEANING METHOD
WANTEN PETER FRANCISCUS, JANSEN HANS, DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS, JANSEN BAUKE, BEEREN RAYMOND GERARDUS MARIUS, HOEKERD KORNELIS TIJMEN, CUIJPERS JOHANNES WILHELMUS JACOBUS LEONARDUS, STAVENGA MARCO KOERT
Year of Publication 15.04.2010
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Year of Publication 15.04.2010
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Lithographic apparatus and in-line cleaning apparatus
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Year of Publication 10.10.2017
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Year of Publication 10.10.2017
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LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS
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Year of Publication 24.11.2016
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Year of Publication 24.11.2016
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Lithographic apparatus and a method of operating the apparatus
Landheer, Siebe, Jansen, Bauke, Miranda, Marcio Alexandre Cano, Bruls, Richard Joseph, Tanasa, Gheorghe, Thomas, Ivo Adam Johannes, Jorritsma, Laurentius Catrinus, Noordam, Lambertus Dominicus, Van Der Lee, Maurice Martinus Johannes, Jansen, Hans, Meester, Arnout Johannes, Bruijstens, Jeroen Peter Johannes
Year of Publication 01.10.2019
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Year of Publication 01.10.2019
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Lithographic apparatus and in-line cleaning apparatus
De Graaf Roelof Frederik, Jansen Hans, Heusschen Hubertus Leonardus Franciscus, Jansen Bauke
Year of Publication 02.08.2016
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Year of Publication 02.08.2016
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LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Landheer, Siebe, Jansen, Bauke, Miranda, Marcio Alexandre Cano, Bruls, Richard Joseph, Tanasa, Gheorghe, Thomas, Ivo Adam Johannes, Jorritsma, Laurentinus Catrinus, Noordam, Lambertus Dominicus, Van Der Lee, Maurice Martinus Johannes, Jansen, Hans, Meester, Arnout Johannes, Bruijstens, Jeroen Peter Johannes
Year of Publication 21.03.2019
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Year of Publication 21.03.2019
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Lithographic apparatus and a method of operating the apparatus
Landheer, Siebe, Jansen, Bauke, Miranda, Marcio Alexandre Cano, Bruls, Richard Joseph, Tanasa, Gheorghe, Thomas, Ivo Adam Johannes, Jorritsma, Laurentius Catrinus, Noordam, Lambertus Dominicus, Van Der Lee, Maurice Martinus Johannes, Jansen, Hans, Meester, Arnout Johannes, Bruijstens, Jeroen Peter Johannes
Year of Publication 11.12.2018
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Year of Publication 11.12.2018
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LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS
JANSEN HANS, JANSEN BAUKE, DE GRAAF ROELOF FREDERIK, HEUSSCHEN HUBERTUS LEONARDUS FRANCISCUS
Year of Publication 12.11.2015
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Year of Publication 12.11.2015
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Lithographic apparatus and in-line cleaning apparatus
JANSEN HANS, JANSEN BAUKE, DE GRAAF ROELOF FREDERIK, HEUSSCHEN HUBERTUS LEONARDUS FRANCISCUS
Year of Publication 19.05.2015
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Year of Publication 19.05.2015
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LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
MIRANDA MARCIO ALEXANDRE CANO, NOORDAM LAMBERTUS DOMINICUS, JANSEN HANS, JORRITSMA LAURENTIUS CATRINUS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, MEESTER ARNOUT JOHANNES, VAN DER LEE MAURICE MARTINUS JOHANNES, LANDHEER SIEBE
Year of Publication 05.05.2016
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Year of Publication 05.05.2016
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LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS
JANSEN HANS, JANSEN BAUKE, DE GRAAF ROELOF FREDERIK, HEUSSCHEN HUBERTUS LEONARDUS FRANCISCUS
Year of Publication 08.11.2012
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Year of Publication 08.11.2012
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Lithographic apparatus and in-line cleaning apparatus
JANSEN HANS, JANSEN BAUKE, DE GRAAF ROELOF FREDERIK, HEUSSCHEN HUBERTUS LEONARDUS FRANCISCUS
Year of Publication 14.08.2012
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Year of Publication 14.08.2012
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Lithographic apparatus and in-line cleaning apparatus
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Year of Publication 14.08.2012
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Year of Publication 14.08.2012
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Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure
MIRANDA MARCIO ALEXANDRE CANO, NOORDAM LAMBERTUS DOMINICUS, JANSEN HANS, JORRITSMA LAURENTIUS CATRINUS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, MEESTER ARNOUT JOHANNES, VAN DER LEE MAURICE MARTINUS JOHANNES, LANDHEER SIEBE
Year of Publication 03.11.2015
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Year of Publication 03.11.2015
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Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure
MIRANDA MARCIO ALEXANDRE CANO, JANSEN HANS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, MEESTER ARNOUT JOHANNES, LANDHEER SIEBE
Year of Publication 20.05.2014
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Year of Publication 20.05.2014
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Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
WANTEN PETER FRANCISCUS, JANSEN HANS, DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS, JANSEN BAUKE, BEEREN RAYMOND GERARDUS MARIUS, HOEKERD KORNELIS TIJMEN, CUIJPERS JOHANNES WILHELMUS JACOBUS LEONARDUS, STAVENGA MARCO KOERT
Year of Publication 21.04.2015
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Year of Publication 21.04.2015
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Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
WANTEN PETER FRANCISCUS, JANSEN HANS, DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS, JANSEN BAUKE, BEEREN RAYMOND GERARDUS MARIUS, HOEKERD KORNELIS TIJMEN, CUIJPERS JOHANNES WILHELMUS JACOBUS LEONARDUS, STAVENGA MARCO KOERT
Year of Publication 03.02.2015
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Year of Publication 03.02.2015
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