Quantification of dopant species using atom probe tomography for semiconductor application
Yeoh, Wai Kong, Hung, Shih‐Wei, Chen, Shih‐Che, Lin, Yi‐Hsiang, Lee, Jang Jung
Published in Surface and interface analysis (01.05.2020)
Published in Surface and interface analysis (01.05.2020)
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Journal Article
Group IVB metal oxides high permittivity gate insulators deposited from anhydrous metal nitrates
Tiezhong Ma, Campbell, S.A., Smith, R., Hoilien, N., Boyong He, Gladfelter, W.L., Hobbs, C., Buchanan, D., Taylor, C., Gribelyuk, M., Tiner, M., Coppel, M., Jang Jung Lee
Published in IEEE transactions on electron devices (01.10.2001)
Published in IEEE transactions on electron devices (01.10.2001)
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Journal Article
Outdoor airborne contamination control for semiconductor manufacturing process
Chia-ching Wan, Jang-Jung Lee, Lien-fang Wu
Published in 2010 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2010)
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Published in 2010 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2010)
Conference Proceeding
Line edge roughness analysis using atomic force microscopy
Liu, Wen-Chung, Hou, Duen-Huei, Hu, Wei-Shan, Lee, Jang Jung, Li, Che-Liang, Gui, Dong
Year of Publication 03.10.2023
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Year of Publication 03.10.2023
Patent
AIR CONDITIONER
PARK, Chul Byung, LEE, Jang Jung, MOON, Hong Yeol, YOON, Seung-Jun, CHOI, Jei Min, KIM, Hyun-Ho, PARK, Hyeon U
Year of Publication 10.01.2024
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Year of Publication 10.01.2024
Patent
AIR CONDITIONER
PARK, Chul Byung, LEE, Jang Jung, MOON, Hong Yeol, YOON, Seung-Jun, CHOI, Jei Min, KIM, Hyun-Ho, PARK, Hyeon U
Year of Publication 08.11.2023
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Year of Publication 08.11.2023
Patent
AIR CONDITIONER
PARK, Chul Byung, LEE, Jang Jung, MOON, Hong Yeol, YOON, Seung-Jun, CHOI, Jei Min, KIM, Hyun-Ho, PARK, Hyeon U
Year of Publication 11.10.2023
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Year of Publication 11.10.2023
Patent