METROLOGY METHOD AND APPARATUS
JAK MARTIN JACOBUS JOHAN, DEN BOEF ARIE JEFFREY, PANDEY NITESH, EBERT MARTIN
Year of Publication 26.04.2022
Get full text
Year of Publication 26.04.2022
Patent
리소그래피 프로세스들에서의 계측
JAK MARTIN JACOBUS JOHAN, MATHIJSSEN SIMON GIJSBERT JOSEPHUS, BHATTACHARYYA KAUSTUVE
Year of Publication 02.04.2020
Get full text
Year of Publication 02.04.2020
Patent
계측 레시피 선택
DEN BOEF ARIE JEFFREY, JAK MARTIN JACOBUS JOHAN, BHATTACHARYYA KAUSTUVE
Year of Publication 14.05.2019
Get full text
Year of Publication 14.05.2019
Patent
패터닝 프로세스 파라미터를 결정하는 방법
JAK MARTIN JACOBUS JOHAN, MATHIJSSEN SIMON GIJSBERT JOSEPHUS, BYUN JINMOO, BHATTACHARYYA KAUSTUVE, JANG WON JAE
Year of Publication 14.04.2020
Get full text
Year of Publication 14.04.2020
Patent
리소그래피 방법 및 장치
JAK MARTIN JACOBUS JOHAN, DEN BOEF ARIE JEFFREY, PANDEY NITESH, EBERT MARTIN
Year of Publication 26.03.2020
Get full text
Year of Publication 26.03.2020
Patent
엣지 러프니스 파라미터 결정
KUBIS MICHAEL, JAK MARTIN JACOBUS JOHAN, DEN BOEF ARIE JEFFREY, QUINTANILHA RICHARD
Year of Publication 30.01.2020
Get full text
Year of Publication 30.01.2020
Patent
METROLOGY METHOD, TARGET, AND SUBSTRATE
VAN BUEL HENRICUS WILHELMUS MARIA, SCHAAR MAURITS VAN DER, MICHAEL KUBIS, DEN BOEF ARIE JEFFREY, JOHANNES MARCUS MARIA BELTMAN, ANDREAS FUCHS, BHATTACHARYA KAUSTUBH, HENDRIK JAN HIDDE SMILDE, CHRISTOPHE DAVID FOUQUET, OMER ABUBAKER OMER ADAM, JAK MARTIN JACOBUS JOHAN, LIU XING LAN, FRANCISCUS VAN HAREN RICHARD JOHANNES
Year of Publication 10.08.2023
Get full text
Year of Publication 10.08.2023
Patent
구조체를 측정하는 방법, 검사 장치, 리소그래피 시스템 및 디바이스 제조 방법
BOZKURT MURAT, MACHT LUKASZ JERZY, JAK MARTIN JACOBUS JOHAN, HAJIAHMADI MOHAMMADREZA, WARNAAR PATRICK, GRZELA GRZEGORZ, VAN DER SCHAAR MAURITS
Year of Publication 13.01.2020
Get full text
Year of Publication 13.01.2020
Patent
METROLOGY METHOD TARGET AND SUBSTRATE
VAN BUEL HENRICUS WILHELMUS MARIA, DEN BOEF ARIE JEFFREY, VAN HAREN RICHARD JOHANNES FRANCISCUS, BHATTACHARYYA KAUSTUVE, FUCHS ANDREAS, FOUQUET CHRISTOPHE DAVID, BELTMAN JOHANNES MARCUS MARIA, ADAM OMER ABUBAKER OMER, SMILDE HENDRIK JAN HIDDE, KUBIS MICHAEL, JAK MARTIN JACOBUS JOHAN, LIU XING LAN, VAN DER SCHAAR MAURITS
Year of Publication 10.06.2022
Get full text
Year of Publication 10.06.2022
Patent
스택 차이를 이용한 설계 및 교정
VISSER BART, JIANG AIQIN, DEN BOEF ARIE JEFFREY, JAK MARTIN JACOBUS JOHAN, BHATTACHARYYA KAUSTUVE, VAN DER LAAN HANS
Year of Publication 01.07.2019
Get full text
Year of Publication 01.07.2019
Patent
METROLOGY METHOD TARGET AND SUBSTRATE
VAN BUEL HENRICUS WILHELMUS MARIA, DEN BOEF ARIE JEFFREY, VAN HAREN RICHARD JOHANNES FRANCISCUS, BHATTACHARYYA KAUSTUVE, FUCHS ANDREAS, FOUQUET CHRISTOPHE DAVID, BELTMAN JOHANNES MARCUS MARIA, ADAM OMER ABUBAKER OMER, SMILDE HENDRIK JAN HIDDE, KUBIS MICHAEL, JAK MARTIN JACOBUS JOHAN, LIU XING LAN, VAN DER SCHAAR MAURITS
Year of Publication 08.09.2021
Get full text
Year of Publication 08.09.2021
Patent
METROLOGY METHOD TARGET AND SUBSTRATE
VAN BUEL HENRICUS WILHELMUS MARIA, DEN BOEF ARIE JEFFREY, VAN HAREN RICHARD JOHANNES FRANCISCUS, BHATTACHARYYA KAUSTUVE, FUCHS ANDREAS, FOUQUET CHRISTOPHE DAVID, BELTMAN JOHANNES MARCUS MARIA, ADAM OMER ABUBAKER OMER, SMILDE HENDRIK JAN HIDDE, KUBIS MICHAEL, JAK MARTIN JACOBUS JOHAN, LIU XING LAN, VAN DER SCHAAR MAURITS
Year of Publication 23.03.2021
Get full text
Year of Publication 23.03.2021
Patent
METHOD, APPARATUS AND SUBSTRATES FOR LITHOGRAPHIC METROLOGY
SMILDE HENDRIK JAN HIDDE, DEN BOEF ARIE JEFFREY, JAK MARTIN JACOBUS JOHAN, ADAM OMER ABUBAKER OMER
Year of Publication 25.07.2016
Get full text
Year of Publication 25.07.2016
Patent
METROLOGY METHOD, TARGET, AND SUBSTRATE
VAN BUEL HENRICUS WILHELMUS MARIA, SCHAAR MAURITS VAN DER, MICHAEL KUBIS, DEN BOEF ARIE JEFFREY, JOHANNES MARCUS MARIA BELTMAN, ANDREAS FUCHS, BHATTACHARYA KAUSTUBH, HENDRIK JAN HIDDE SMILDE, CHRISTOPHE DAVID FOUQUET, OMER ABUBAKER OMER ADAM, JAK MARTIN JACOBUS JOHAN, LIU XING LAN, FRANCISCUS VAN HAREN RICHARD JOHANNES
Year of Publication 27.07.2020
Get full text
Year of Publication 27.07.2020
Patent