Pressure Dependence of Rate Coefficients of Unimolecular and Chemical Activation Reactions Connected to the Potential Energy Wells of Si 2 H 2 Cl 4 , Si 2 Cl 6 , and Si 2 Cl 4 via Rice–Ramsperger–Kassel–Marcus Calculations
Noda, Kaito, Jagawa, Yoshihiro, Fuwa, Akio, Kunioshi, Nílson
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (24.11.2022)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (24.11.2022)
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Journal Article
Pressure Dependence of Rate Coefficients of Unimolecular and Chemical Activation Reactions Connected to the Potential Energy Wells of Si2H2Cl4, Si2Cl6, and Si2Cl4 via Rice–Ramsperger–Kassel–Marcus Calculations
Noda, Kaito, Jagawa, Yoshihiro, Fuwa, Akio, Kunioshi, Nílson
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (24.11.2022)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (24.11.2022)
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Journal Article
Pressure dependence of rate coefficients of unimolecular and chemical activation reactions connected to the potential energy wells of chlorinated monosilanes by RRKM calculations
Noda, Kaito, Jagawa, Yoshihiro, Fuwa, Akio, Kunioshi, Nílson
Published in International journal of chemical kinetics (01.09.2021)
Published in International journal of chemical kinetics (01.09.2021)
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Journal Article
워크의 세정 처리 방법 및 워크의 세정 처리 시스템
KANEKO YUKI, WAKASUGI KATSURO, JAGAWA YOSHIHIRO, IWASAKI FUMITOSHI, NODA KAITO
Year of Publication 12.01.2023
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Year of Publication 12.01.2023
Patent
WORKPIECE CLEANING PROCESS METHOD AND WORKPIECE CLEANING PROCESS SYSTEM
KANEKO Yuki, JAGAWA Yoshihiro, NODA Kaito, IWASAKI Fumitoshi, WAKASUGI Katsuro
Year of Publication 03.02.2022
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Year of Publication 03.02.2022
Patent
METHOD OF CLEANING WORK AND CLEANING SYSTEM FOR WORK
JAGAWA, Yoshihiro, WAKASUGI, Katsuro, IWASAKI, Fumitoshi, NODA, Kaito, KANEKO, Yuki
Year of Publication 31.08.2023
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Year of Publication 31.08.2023
Patent
Workpiece cleaning treatment method and workpiece cleaning treatment system
KANEKO YUKI, WAKASUGI KATSURO, JAGAWA YOSHIHIRO, IWASAKI FUMITOSHI, NODA KAITO
Year of Publication 09.06.2023
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Year of Publication 09.06.2023
Patent
Method for cleaning and processing workpieces, and cleaning and processing system for workpieces
IWASAKI, FUMITOSHI, NODA, KAITO, WAKASUGI, KATSURO, KANEKO, YUKI, JAGAWA, YOSHIHIRO
Year of Publication 11.08.2022
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Year of Publication 11.08.2022
Patent
Method for cleaning and processing workpieces, and cleaning and processing system for workpieces
IWASAKI, FUMITOSHI, NODA, KAITO, WAKASUGI, KATSURO, KANEKO, YUKI, JAGAWA, YOSHIHIRO
Year of Publication 01.02.2022
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Year of Publication 01.02.2022
Patent