Effect of oxygen plasma on nanomechanical silicon nitride resonators
Luhmann, Niklas, Jachimowicz, Artur, Schalko, Johannes, Sadeghi, Pedram, Sauer, Markus, Foelske-Schmitz, Annette, Schmid, Silvan
Published in Applied physics letters (07.08.2017)
Published in Applied physics letters (07.08.2017)
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Journal Article
Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode
Kucera, Martin, Wistrela, Elisabeth, Pfusterschmied, Georg, Ruiz-Díez, Víctor, Manzaneque, Tomás, Hernando-García, Jorge, Sánchez-Rojas, José Luis, Jachimowicz, Artur, Schalko, Johannes, Bittner, Achim, Schmid, Ulrich
Published in Sensors and actuators. B, Chemical (01.09.2014)
Published in Sensors and actuators. B, Chemical (01.09.2014)
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Journal Article
Distortion-free measurement of electric field strength with a MEMS sensor
Kainz, Andreas, Steiner, Harald, Schalko, Johannes, Jachimowicz, Artur, Kohl, Franz, Stifter, Michael, Beigelbeck, Roman, Keplinger, Franz, Hortschitz, Wilfried
Published in Nature electronics (08.01.2018)
Published in Nature electronics (08.01.2018)
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Journal Article
Robust Precision Position Detection With an Optical MEMS Hybrid Device
Hortschitz, W., Steiner, H., Sachse, M., Stifter, M., Kohl, F., Schalko, J., Jachimowicz, A., Keplinger, F., Sauter, T.
Published in IEEE transactions on industrial electronics (1982) (01.12.2012)
Published in IEEE transactions on industrial electronics (1982) (01.12.2012)
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Journal Article
An Optical In-Plane MEMS Vibration Sensor
Hortschitz, W., Steiner, H., Sachse, M., Stifter, M., Kohl, F., Schalko, J., Jachimowicz, A., Keplinger, F., Sauter, T.
Published in IEEE sensors journal (01.11.2011)
Published in IEEE sensors journal (01.11.2011)
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Journal Article
Hot-film and calorimetric thermal air flow sensors realized with printed board technology
Glatzl, Thomas, Cerimovic, Samir, Steiner, Harald, Talic, Almir, Beigelbeck, Roman, Jachimowicz, Artur, Sauter, Thilo, Keplinger, Franz
Published in Journal of sensors and sensor systems (19.07.2016)
Published in Journal of sensors and sensor systems (19.07.2016)
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Journal Article
Lorentz force based magnetic field sensor with optical readout
Keplinger, Franz, Kvasnica, Samuel, Jachimowicz, Artur, Kohl, Franz, Steurer, Johannes, Hauser, Hans
Published in Sensors and actuators. A. Physical. (01.02.2004)
Published in Sensors and actuators. A. Physical. (01.02.2004)
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Journal Article
High resolution flow characterization in Bio-MEMS
Ernst, Herbert, Jachimowicz, Artur, Urban, Gerald A.
Published in Sensors and actuators. A. Physical. (15.08.2002)
Published in Sensors and actuators. A. Physical. (15.08.2002)
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Journal Article
Miniaturisierte thermische Fluidsensoren – Strömungs- und thermische Leitfähigkeitssensoren
Talić, Almir, Ćerimović, Samir, Kohl, Franz, Jachimowicz, Artur, Sauter, Thilo, Voglhuber-Brunnmaier, Thomas, Jakoby, Bernhard
Published in Elektrotechnik und Informationstechnik (07.08.2015)
Published in Elektrotechnik und Informationstechnik (07.08.2015)
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Journal Article
A model of metal film resistance bolometers based on the electro-thermal feedback effect
Kohl, Franz, Keplinger, Franz, Jachimowicz, Artur, Schalko, Johannes
Published in Sensors and actuators. A. Physical. (21.09.2004)
Published in Sensors and actuators. A. Physical. (21.09.2004)
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Journal Article
Optimization of microfluidic particle sorters based on dielectrophoresis
Nieuwenhuis, J.H., Jachimowicz, A., Svasek, P., Vellekoop, M.J.
Published in IEEE sensors journal (01.10.2005)
Published in IEEE sensors journal (01.10.2005)
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Journal Article
A micromachined doubly-clamped beam rheometer for the measurement of viscosity and concentration of silicon-dioxide-in-water suspensions
Riesch, C., Jachimowicz, A., Keplinger, F., Reichel, E.K., Jakoby, B.
Published in 2008 IEEE Sensors (01.10.2008)
Published in 2008 IEEE Sensors (01.10.2008)
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Conference Proceeding
Improved Reference-Free Vibration-Suppressed Optical MEMS Electric Field Strength Sensor
Kainz, Andreas, Steiner, Harald, Hortschitz, Wilfried, Schalko, Johannes, Jachimowicz, Artur, Keplinger, Franz
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding
Noise considerations on hybrid optical MEMS displacement sensors
Hortschitz, W., Kohl, F., Sachse, M., Stifter, M., Sauter, T., Steiner, H., Schalko, J., Jachimowicz, A., Keplinger, F.
Published in 2011 IEEE SENSORS Proceedings (01.10.2011)
Published in 2011 IEEE SENSORS Proceedings (01.10.2011)
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Conference Proceeding
A Novel Sensor System for Liquid Properties Based on a Micromachined Beam and a Low-Cost Optical Readout
Riesch, C., Jachimowicz, A., Keplinger, F., Reichel, E.K., Jakoby, B.
Published in 2007 IEEE Sensors (01.10.2007)
Published in 2007 IEEE Sensors (01.10.2007)
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Conference Proceeding
Highly Sensitive Sensor for Flow Velocity and Flow Direction Measurement
Keplinger, F., Kuntner, J., Jachimowicz, A., Kohl, F., Jakoby, B.
Published in 2006 5th IEEE Conference on Sensors (01.10.2006)
Published in 2006 5th IEEE Conference on Sensors (01.10.2006)
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Conference Proceeding
FEM-Based Analysis of Micromachined Calorimetric Flow Sensors
Kohl, F., Beigelbeck, R., Loschmidt, P., Kuntner, J., Jachimowicz, A.
Published in 2006 5th IEEE Conference on Sensors (01.10.2006)
Published in 2006 5th IEEE Conference on Sensors (01.10.2006)
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Conference Proceeding
Effect of oxygen plasma on nanomechanical silicon nitride resonators
Luhmann, Niklas, Jachimowicz, Artur, Schalko, Johannes, Sadeghi, Pedram, Sauer, Markus, Foelske-Schmitz, Annette, Schmid, Silvan
Published in arXiv.org (09.06.2017)
Published in arXiv.org (09.06.2017)
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