On space charge effects in laboratory-based photoemission electron microscopy using compact gas discharge extreme ultraviolet sources
Wilson, Daniel, Schmitz, Christoph, Rudolf, Denis, Wiemann, Carsten, Schneider, Claus M, Juschkin, Larissa
Published in New journal of physics (01.10.2020)
Published in New journal of physics (01.10.2020)
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Journal Article
Restorative Self-Image of Rough-Line Grids: Application to Coherent EUV Talbot Lithography
Hyun-su Kim, Wei Li, Marconi, Mario C., Brocklesby, William S., Juschkin, Larissa
Published in IEEE photonics journal (01.06.2016)
Published in IEEE photonics journal (01.06.2016)
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Journal Article
Fundamentals and limits for the EUV emission of pinch plasma sources for EUV lithography
Krücken, Thomas, Bergmann, Klaus, Juschkin, Larissa, Lebert, Rainer
Published in Journal of physics. D, Applied physics (07.12.2004)
Published in Journal of physics. D, Applied physics (07.12.2004)
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Journal Article
Computational proximity lithography with extreme ultraviolet radiation
Deuter, Valerie, Grochowicz, Maciej, Brose, Sascha, Biller, Jan, Danylyuk, Serhiy, Taubner, Thomas, Siemion, Agnieszka, Grützmacher, Detlev, Juschkin, Larissa
Published in Optics express (31.08.2020)
Published in Optics express (31.08.2020)
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Journal Article
Characterisation of engineered defects in extreme ultraviolet mirror substrates using lab-scale extreme ultraviolet reflection ptychography
Lu, Haoyan, Odstrčil, Michal, Pooley, Charles, Biller, Jan, Mebonia, Mikheil, He, Guanze, Praeger, Matthew, Juschkin, Larissa, Frey, Jeremy, Brocklesby, William
Published in Ultramicroscopy (01.07.2023)
Published in Ultramicroscopy (01.07.2023)
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Journal Article
Spatially Resolved Spectroscopic Extreme Ultraviolet Reflectometry for Laboratory Applications
Tryus, Maksym, Herbert, Stefan, Wilson, Daniel, Bahrenberg, Lukas, Danylyuk, Serhiy, Juschkin, Larissa
Published in Journal of nanoscience and nanotechnology (01.01.2019)
Published in Journal of nanoscience and nanotechnology (01.01.2019)
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Journal Article
Fast and easy fabrication methodology of Fresnel zone plates for the extreme ultraviolet and soft x-ray regions
Schümmer, A, Mertins, H-Ch, Schneider, Claus Michael, Adam, Roman, Trellenkamp, Stefan, Borowski, Rene, Juschkin, Larissa, Berges, Ulf
Published in Applied optics. Optical technology and biomedical optics (01.02.2019)
Published in Applied optics. Optical technology and biomedical optics (01.02.2019)
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Journal Article
Freeform lens collimating spectrum-folded Hadamard transform near-infrared spectrometer
Wang, Xiaoduo, Liu, Hua, Juschkin, Larissa, Li, Yunpeng, Xu, Jialin, Quan, Xiangqian, Lu, Zhenwu
Published in Optics communications (01.12.2016)
Published in Optics communications (01.12.2016)
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Journal Article
Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry
Tryus, Maksym, Nikolaev, Konstantin V., Makhotkin, Igor A., Schubert, Jürgen, Kibkalo, Lidia, Danylyuk, Serhiy, Giglia, Angelo, Nicolosi, Piergiorgio, Juschkin, Larissa
Published in Thin solid films (30.06.2019)
Published in Thin solid films (30.06.2019)
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Journal Article
EUV microscopy for defect inspection by dark-field mapping and zone plate zooming
Juschkin, Larissa, Freiberger, Ralf, Bergmann, Klaus
Published in Journal of physics. Conference series (01.09.2009)
Published in Journal of physics. Conference series (01.09.2009)
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Journal Article
Fractional Talbot lithography with extreme ultraviolet light
Kim, Hyun-su, Li, Wei, Danylyuk, Serhiy, Brocklesby, William S, Marconi, Mario C, Juschkin, Larissa
Published in Optics letters (15.12.2014)
Published in Optics letters (15.12.2014)
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Journal Article
Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source
Rudolf, Denis, Bußmann, Jan, Odstrčil, Michal, Dong, Minjie, Bergmann, Klaus, Danylyuk, Serhiy, Juschkin, Larissa
Published in Optics letters (15.06.2015)
Published in Optics letters (15.06.2015)
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Journal Article
Laser-assisted vacuum arc extreme ultraviolet source: a comparison of picosecond and nanosecond laser triggering
Beyene, Girum A, Tobin, Isaac, Juschkin, Larissa, Hayden, Patrick, O'Sullivan, Gerry, Sokell, Emma, Zakharov, Vassily S, Zakharov, Sergey V, O'Reilly, Fergal
Published in Journal of physics. D, Applied physics (08.06.2016)
Published in Journal of physics. D, Applied physics (08.06.2016)
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Journal Article
A scanning reflection X‐ray microscope for magnetic imaging in the EUV range
Schümmer, Andreas, Mertins, H.-Ch, Schneider, Claus Michael, Adam, Roman, Trellenkamp, Stefan, Borowski, Rene, Bürgler, Daniel Emil, Juschkin, Larissa, Berges, Ulf
Published in Journal of synchrotron radiation (01.11.2019)
Published in Journal of synchrotron radiation (01.11.2019)
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Journal Article
Line image sensors for spectroscopic applications in the extreme ultraviolet
Banyay, Matus, Brose, Sascha, Juschkin, Larissa
Published in Measurement science & technology (01.10.2009)
Published in Measurement science & technology (01.10.2009)
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Journal Article
Extreme ultraviolet proximity lithography for fast, flexible and parallel fabrication of infrared antennas
Kunkemöller, Georg, Mass, Tobias W W, Michel, Ann-Katrin U, Kim, Hyun-Su, Brose, Sascha, Danylyuk, Serhiy, Taubner, Thomas, Juschkin, Larissa
Published in Optics express (05.10.2015)
Published in Optics express (05.10.2015)
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Journal Article