Super-Resolution Fluorescence Imaging for Semiconductor Nanoscale Metrology and Inspection
Nguyen, Duyen Thi, Mun, Seohyun, Park, HyunBum, Jeong, Uidon, Kim, Geun-ho, Lee, Seongsil, Jun, Chung-Sam, Sung, Myung Mo, Kim, Doory
Published in Nano letters (28.12.2022)
Published in Nano letters (28.12.2022)
Get full text
Journal Article
Determination of the Absolute Thickness of Ultrathin Al2O3 Overlayers on Si (100) Substrate
Kim, Kyung Joong, Jang, Jong Shik, Lee, Joo-Hee, Jee, Yun-Jung, Jun, Chung-Sam
Published in Analytical chemistry (Washington) (15.10.2009)
Published in Analytical chemistry (Washington) (15.10.2009)
Get full text
Journal Article
Characterization of residual implant damage by generation time technique
Jee, Yun-Jung, Kim, Chun-Yong, Jun, Chung-Sam, Kim, Tae-Sung, Belyaev, Anton, Marinskiy, Dmitriy
Published in Solid-state electronics (01.04.2013)
Published in Solid-state electronics (01.04.2013)
Get full text
Journal Article
SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD
LEE JIN WOO, LEE HYEONG CHEOL, JUN CHUNG SAM, SUN JONG CHEON, LEE SU YOUNG, JEON SE KYE
Year of Publication 30.05.2024
Get full text
Year of Publication 30.05.2024
Patent
INSPECITON SYSTEM OF SEMICONDUCTOR WAFER AND METHOD OF DRIVING THE SAME
IHM DONG CHUL, JUN CHUNG SAM, LEE DONG RYUL, YOON DO YOUNG, AHN JEONG HO
Year of Publication 03.03.2023
Get full text
Year of Publication 03.03.2023
Patent
Semiconductor device measuring device and method for the same
RYOO HYUN WOO, IHM DONG CHUL, JUN CHUNG SAM, LEE DONG RYUL, BYUN JUNG HOON, YOON DA HEE, LEE WOO YUN
Year of Publication 05.04.2023
Get full text
Year of Publication 05.04.2023
Patent
INSPECITON SYSTEM OF SEMICONDUCTOR WAFER AND METHOD OF DRIVING THE SAME
IHM DONG CHUL, JUN CHUNG SAM, LEE DONG RYUL, YOON DO YOUNG, AHN JEONG HO
Year of Publication 18.03.2020
Get full text
Year of Publication 18.03.2020
Patent
THROUGH-FOCUS IMAGE-BASED METROGY DEVICE OPERATION METHOD THEREOF AND COMPUTING DEVICE FOR EXECUTING THE OPERATION
LEE MYUNG JUN, RYU SUNG YOON, OH SEUNG RYEOL, RIM MIN HO, YUN SEONG, PARK DAE JUN, LEE SU JIN, LEE JAE YONG, JUN CHUNG SAM, KIM KWANG SOO
Year of Publication 28.12.2021
Get full text
Year of Publication 28.12.2021
Patent
SCANNING PROBE INSPECTOR
SOHN YOUNG HOON, RYU SUNG YOON, OH DUCK MAHN, JUN CHUNG SAM, JEE YUN JUNG
Year of Publication 14.06.2019
Get full text
Year of Publication 14.06.2019
Patent