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ZOELLIN JOCHEN, GRAF JUERGEN, EHRENPFORDT RICARDO, CURCIC MICHAEL, SCHELLING CHRISTOPH, ANTE FREDERIK
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Component having a micromechanical microphone structure
ZOELLIN JOCHEN, GRAF JUERGEN, EHRENPFORDT RICARDO, CURCIC MICHAEL, SCHELLING CHRISTOPH, ANTE FREDERIK
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Year of Publication 08.09.2015
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