Photoresist ashing technology using N2/O2 ferrite-core ICP in the dual damascene process
HYOUN WOO KIM, JU HYUN MYUNG, GEUN YOUNG YEOM, MYOUNG, Jae-Min, KIM, Hyoung-June, JONG WOO LEE, KIM, Hyung-Sun, KIM, Keeho, JANG, Jeong-Yeol, YOON, Tae-Ho, SUNG KYEONG KIM, CHOI, Dae-Kyu, CHUNG, Chin-Wook
Published in Journal of materials science (01.08.2006)
Published in Journal of materials science (01.08.2006)
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Journal Article
Time evolution of In2O3 rod-like structures in metalorganic chemical vapor deposition process
Kim, Hyoun Woo, Kim, Nam Ho, Shim, Seung Hyun, Myung, Ju Hyun
Published in Journal of materials science (01.05.2006)
Published in Journal of materials science (01.05.2006)
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Journal Article
Characteristics of Ir etching using Ar/Cl2 inductively coupled plasmas
PARK, Se-Geun, KIM, Chin-Woo, SONG, Ho-Young, HYOUN WOO KIM, JU HYUN MYUNG, JOO, Sukho, SOON OH PARK, LEE, Kyu-Mann
Published in Journal of materials science (01.09.2005)
Published in Journal of materials science (01.09.2005)
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Journal Article
Application of N2/Ar inductively coupled plasma to the photoresist ashing for low-k dielectrics
HYOUN WOO KIM, JU HYUN MYUNG, PARK, Se-Geun, LEE, Jae-Gab, NAM HO KIM, YOO, Chung-Gon, KEE WON SUH, SUNG KYEONG KIM, CHOI, Dae-Kyu, CHUNG, Chin-Wook, KANG, Chang-Jin, WAN JAE PARK
Published in Journal of materials science (01.07.2005)
Published in Journal of materials science (01.07.2005)
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Journal Article
Photoresist ashing in nitrogen gas using ferrite core inductively coupled plasmas
Kim, Hyoun Woo, Myung, Ju Hyun, Kim, Nam Ho, Chung, Chin Wook, Park, Wan Jae, Kang, Chang-Jin, Yoo, Chung-Gon, Choi, Dae-Kyu
Published in Vacuum (14.10.2005)
Published in Vacuum (14.10.2005)
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Journal Article
Effects of Nature Herb Mixture Containing Laminaria japonica Areschoung on Fine Dust-induced Bronchitis in Mice
Han, Su-Hyun, Joo, In-Hwan, Lee, Su-Bin, Kim, Dong-Hee, Hyun, Ju-Myung, Park, Jong-Min
Published in Journal of Physiology & Pathology in Korean Medicine (25.10.2020)
Published in Journal of Physiology & Pathology in Korean Medicine (25.10.2020)
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Journal Article
Synthesis and characteristics of SnO2 nanorods on Pd-coated substrates
Kim, Hyoun Woo, Shim, Seung Hyun, Myung, Ju Hyun
Published in Brazilian journal of physics (01.12.2005)
Published in Brazilian journal of physics (01.12.2005)
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Journal Article
Study of ashing for low-k dielectrics using the N 2/O 2 ferrite-core inductively coupled plasmas
Kim, Hyoun Woo, Myung, Ju Hyun, Kim, Nam Ho, Lee, Han Sup, Park, Se-Geun, Lee, Jae Gab, Chung, Chin Wook, Park, Wan Jae, Kang, Chang-Jin, Yoo, Chung-Gon, Ko, Kwang-Hyuk, Woo, Je-Ho, Choi, Sang-Don, Choi, Dae-Kyu
Published in Thin solid films (26.05.2006)
Published in Thin solid films (26.05.2006)
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Journal Article
Study of ashing for low-k dielectrics using the N2/O2 ferrite-core inductively coupled plasmas
Kim, H W, Myung, J H, Kim, N H, Lee, H S, Park, S G, Lee, J G, Chung, C W, Park, W J, Kang, C J, Yoo, C G, Ko, K H, Woo, J H, Choi, S D, Choi, D K
Published in Thin solid films (26.05.2006)
Published in Thin solid films (26.05.2006)
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Journal Article