by Hattori, T, Yoshida, T, Shiraishi, T, Takahashi, K, Nohira, H, Joumori, S, Nakajima, K, Suzuki, M, Kimura, K, Kashiwagi, I, Ohshima, C, Ohmi, S, Iwai, H
Published in Microelectronic engineering (01.04.2004)

by Kimura, K., Joumori, S., Oota, Y., Nakajima, K., Suzuki, M.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.06.2004)

by NOHIRA, H, SHIRAISHI, T, SUZUKI, M, KIMURA, K, TAKAHASHI, K, HATTORI, T, KASHIWAGI, I, OHSHIMA, C, OHMI, S, IWAI, H, JOUMORI, S, NAKAJIMA, K
Published in Applied surface science (15.07.2004)

by Nakajima, K., Joumori, S., Suzuki, M., Kimura, K., Osipowicz, T., Tok, K.L., Zheng, J.Z., See, A., Zhang, B.C.
Published in Applied surface science (15.10.2004)

by Nohira, H, Shiraishi, T, Takahashi, K, Hattori, T, Kashiwagi, I, Ohshima, C, Ohmi, S, Iwai, H, Joumori, S, Nakajima, K, Suzuki, M, Kimura, K
Published in Applied surface science (2004)

by Shankar Subramanian, R.
Published in International Semiconductor Device Research Symposium, 2003 (2003)