METHOD OF DETERMINING CONTROL PARAMETERS OF A DEVICE MANUFACTURING PROCESS
SLACHTER, Abraham, MASLOW, Mark John, VAN GORP, Simon Hendrik Celine, ANUNCIADO, Roy, STAALS, Frank, WARNAAR, Patrick, VAN INGEN SCHENAU, Koenraad, TEL, Wim Tjibbo, JOSEN, Marinus
Year of Publication 11.01.2024
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Year of Publication 11.01.2024
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METHOD OF DETERMINING CONTROL PARAMETERS OF A DEVICE MANUFACTURING PROCESS
SLACHTER, Abraham, MASLOW, Mark John, VAN GORP, Simon Hendrik Celine, ANUNCIADO, Roy, STAALS, Frank, WARNAAR, Patrick, VAN INGEN SCHENAU, Koenraad, TEL, Wim Tjibbo, JOSEN, Marinus
Year of Publication 13.12.2023
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Year of Publication 13.12.2023
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A METHOD IN THE MANUFACTURING PROCESS OF A DEVICE, A NON-TRANSITORY COMPUTER-READABLE MEDIUM AND A SYSTEM CONFIGURED TO PERFORM THE METHOD
SLACHTER, Abraham, VAN GORP, Simon, Hendrik, Celine, ANUNCIADO, Roy, TEL, Wim, Tjibbo, STAALS, Frank, MASLOW, Mark, John, WARNAAR, Patrick, VAN INGEN SCHENAU, Koenraad, JOSEN, Marinus
Year of Publication 30.08.2023
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Year of Publication 30.08.2023
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A LITHOGRAPHIC APPARATUS, A METHOD OF CONTROLLING THE APPARATUS AND A DEVICE MANUFACTURING METHOD
LIEBREGTS PAULUS MARTINUS MARIA, STEFFENS KOEN, LI HUA, GUNTER PIETER LEIN JOSEPH, BELL FRANCISCUS WILHELMUS, MULKENS JOHANNES CATHARINUS HUBERTUS, LEENDERS MARTINUS HENDRIKUS ANTONIUS, MOERMAN RICHARD, SHULEPOV SERGEI, BRANDS GERT JAN GERARDUS JOHANNES THOMAS, MEIJERS RALPH JOSEPH, STAVENGA MARCO KOERT, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, BESSEMS DAVID, MA ZHENHUA, SMITS MARCUS AGNES JOHANNES, RIEPEN MICHEL, CROMWIJK JAN WILLEM, EVANGELISTA FABRIZIO, KEMPER NICOLAAS RUDOLF, JOSEN MARINUS, WITBERG ERIK
Year of Publication 14.12.2011
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Year of Publication 14.12.2011
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METHOD OF DETERMINING CONTROL PARAMETERS OF A DEVICE MANUFACTURING PROCESS
SLACHTER, Abraham, MASLOW, Mark John, VAN GRORP, Simon Hendrick Celine, ANUNCIADO, Roy, STAALS, Frank, WARNAAR, Patrick, VAN INGEN SCHENAU, Koenraad, TEL, Wim Tjibbo, JOSEN, Marinus
Year of Publication 23.02.2023
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Year of Publication 23.02.2023
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DISPLACEMENT BASED OVERLAY OR ALIGNMENT
HUNSCHE, Stefan, MIDDLEBROOKS, Scott Anderson, WANG, Te-Sheng, JOSEN, Marinus
Year of Publication 16.05.2019
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Year of Publication 16.05.2019
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METHOD OF CONTROLLING A PATTERNING PROCESS, DEVICE MANUFACTURING METHOD
VAN DONGEN, Jeroen, MC NAMARA, Elliott Gerard, HINNEN, Paul Christiaan, JOSEN, Marinus
Year of Publication 12.11.2020
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Year of Publication 12.11.2020
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A LITHOGRAPHIC APPARATUS, A METHOD OF CONTROLLING THE APPARATUS AND A DEVICE MANUFACTURING METHOD
LIEBREGTS PAULUS MARTINUS MARIA, STEFFENS KOEN, LI HUA, GUNTER PIETER LEIN JOSEPH, BELL FRANCISCUS WILHELMUS, MULKENS JOHANNES CATHARINUS HUBERTUS, LEENDERS MARTINUS HENDRIKUS ANTONIUS, MOERMAN RICHARD, SHULEPOV SERGEI, BRANDS GERT JAN GERARDUS JOHANNES THOMAS, MEIJERS RALPH JOSEPH, STAVENGA MARCO KOERT, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, BESSEMS DAVID, MA ZHENHUA, SMITS MARCUS AGNES JOHANNES, RIEPEN MICHEL, CROMWIJK JAN WILLEM, EVANGELISTA FABRIZIO, KEMPER NICOLAAS RUDOLF, JOSEN MARINUS, WITBERG ERIK
Year of Publication 27.08.2010
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Year of Publication 27.08.2010
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DISPLACEMENT BASED OVERLAY OR ALIGNMENT
HUNSCHE, Stefan, WANG, Te-Sheng, JOSEN, Marinus, MIDDLEBROOKS, Scott, Anderson
Year of Publication 16.11.2017
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Year of Publication 16.11.2017
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MEASUREMENT DEVICE AND MEASUREMENT METHOD BASED ON HIGH-ORDER HARMONIC GENERATION
MAAS, DANIEL, J, OUTROT, WILHELMUS, P., E., M, CRAMER HUGO AUGUSTINUS JOSEPH, JOSEN MARINUS
Year of Publication 07.06.2024
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Year of Publication 07.06.2024
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METHOD OF DETERMINING CONTROL PARAMETERS OF A DEVICE MANUFACTURING PROCESS
SLACHTER, Abraham, MASLOW, Mark John, VAN GORP, Simon Hendrik Celine, ANUNCIADO, Roy, STAALS, Frank, WARNAAR, Patrick, VAN INGEN SCHENAU, Koenraad, TEL, Wim Tjibbo, JOSEN, Marinus
Year of Publication 20.05.2021
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Year of Publication 20.05.2021
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