A composition and a multipolymer used in organic antireflective coating
KIM HYUNG-GI, CHO SEUNG-DUK, LEE JONG-DON, LIM YOUNG-TAEK, LEE JUN-HO, KIM MYUNG-WOONG, PARK JOO-HYEON
Year of Publication 08.05.2013
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Year of Publication 08.05.2013
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Acid-labile polymer and resist composition
KIM, SEONG-JU, JOO, HYUN-SANG, PARK, JOO-HYEON, CHO, SEONG-DUK, LIM, YOUNG-TAEK, SEO, DONGUL
Year of Publication 06.11.2002
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Year of Publication 06.11.2002
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