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GERAETS HUBERTUS ANTONIUS, MAGNUSSON SVEN GUNNAR KRISTER, HOFMANS GERARDUS CAROLUS JOHANNUS
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Year of Publication 09.12.2014
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Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product
STAALS FRANK, VAN DER LAAN HANS, BUTLER HANS, MAGNUSSON SVEN GUNNAR KRISTER, HOFMANS GERARDUS CAROLUS JOHANNUS
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Year of Publication 08.10.2013
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Year of Publication 21.05.2013
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Method of measuring focus of a lithographic projection apparatus
GERAETS HUBERTUS ANTONIUS, MAGNUSSON SVEN GUNNAR KRISTER, ZELLENRATH MARK, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 07.05.2013
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Year of Publication 07.05.2013
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METHOD OF MEASURING FOCUS OF A LITHOGRAPHIC PROJECTION APPARATUS
GERAETS HUBERTUS ANTONIUS, MAGNUSSON SVEN GUNNAR KRISTER, ZELLENRATH MARK, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 03.01.2013
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Year of Publication 03.01.2013
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Method of measuring focus of a lithographic projection apparatus
GERAETS HUBERTUS ANTONIUS, MAGNUSSON SVEN GUNNAR KRISTER, ZELLENRATH MARK, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 16.10.2012
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Year of Publication 16.10.2012
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Method of measuring a lithographic projection apparatus
Staals, Frank, Hofmans, Gerardus Carolus Johannus, Van Der Laan, Hans, Magnusson, Sven Gunnar Krister
Year of Publication 26.06.2012
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Year of Publication 26.06.2012
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Method of measuring a lithographic projection apparatus
STAALS FRANK, VAN DER LAAN HANS, MAGNUSSON SVEN GUNNAR KRISTER, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 26.06.2012
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Year of Publication 26.06.2012
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Calibration Method and Inspection Apparatus
GERAETS HUBERTUS ANTONIUS, MAGNUSSON SVEN GUNNAR KRISTER, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 19.01.2012
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Year of Publication 19.01.2012
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METHOD OF MEASURING PROPERTY OF DYNAMIC POSITIONING ERROR IN LITHOGRAPHIC APPARATUS, DATA PROCESSING APPARATUS, AND COMPUTER PROGRAM PRODUCT
STAALS FRANK, VAN DER LAAN HANS, BUTLER HANS, MAGNUSSON SVEN GUNNAR KRISTER, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 21.07.2011
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Year of Publication 21.07.2011
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METHOD OF MEASURING PROPERTIES OF DYNAMIC POSITIONING ERRORS IN A LITHOGRAPHIC APPARATUS, DATA PROCESSING APPARATUS, AND COMPUTER PROGRAM PRODUCT
STAALS FRANK, VAN DER LAAN HANS, BUTLER HANS, MAGNUSSON SVEN GUNNAR KRISTER, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 23.06.2011
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Year of Publication 23.06.2011
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
HOFMANS, GERARDUS, CAROLUS, JOHANNUS, SEGERS, BART, PETER, BERT, SLOTBOOM, DAAN, MAURTIS
Year of Publication 29.12.2009
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Year of Publication 29.12.2009
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
SEGERS BART PETER BERT, SLOTBOOM DAAN MAURTIS, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 24.12.2009
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Year of Publication 24.12.2009
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
SEGERS BART PETER BERT, SLOTBOOM DAAN MAURTIS, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 10.12.2009
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Year of Publication 10.12.2009
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
SEGERS BART PETER BERT, SLOTBOOM DAAN MAURTIS, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 07.12.2009
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Year of Publication 07.12.2009
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METHOD OF MEASURING LITHOGRAPHIC PROJECTION APPARATUS
STAALS FRANK, MAGNUSSON SVEN GUNNAR KRISTER, LAAN HANS VAN DER, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 05.11.2009
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Year of Publication 05.11.2009
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METHOD OF MEASURING A LITHOGRAPHIC PROJECTION APPARATUS
STAALS FRANK, VAN DER LAAN HANS, MAGNUSSON SVEN GUNNAR KRISTER, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 29.10.2009
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Year of Publication 29.10.2009
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METHOD OF MEASURING FOCUS OF LITHOGRAPHIC PROJECTION APPARATUS
GERAETS HUBERTUS ANTONIUS, MAGNUSSON SVEN GUNNAR KRISTER, ZELLENRATH MARK, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 09.07.2009
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Year of Publication 09.07.2009
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