Transport apparatus for elongate substrates
Struempfel, Johannes, Bauer, Reinhardt, Heisig, Andreas, Ulbricht, Andre, Goerke, Steffen, Richter, Heiko, Schwerdtfeger, Falk
Year of Publication 04.09.2012
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Year of Publication 04.09.2012
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Transport apparatus for elongate substrates
STRUEMPFEL JOHANNES, GOERKE STEFFEN, SCHWERDTFEGER FALK, ULBRICHT ANDRE, BAUER REINHARDT, HEISIG ANDREAS, RICHTER HEIKO
Year of Publication 04.09.2012
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Year of Publication 04.09.2012
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Lubricant, useful for components in high vacuum operations, preferably vacuum coating process, comprises aluminum oxide and a carrier, where the aluminum oxide is present as nanopowder
STRUEMPFEL, JOHANNES, HENTSCHEL, MICHAEL, WAYDBRINK, HUBERTUS VON DER
Year of Publication 27.08.2009
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Year of Publication 27.08.2009
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Vacuum coating system comprising a transport unit for transporting substrates
Bauer, Reinhardt, Hupka, Frank, Heisig, Andreas, Struempfel, Johannes, Hecht, Hans-Christian, Erbkamm, Wolfgang
Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Vacuum coating system comprising a transport unit for transporting substrates
STRUEMPFEL JOHANNES, HECHT HANSRISTIAN, BAUER REINHARDT, HUPKA FRANK, HEISIG ANDREAS, ERBKAMM WOLFGANG
Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Transport device with a monitoring appliance and substrate treatment apparatus
Bauer, Reinhardt, Struempfel, Johannes, Heisig, Andreas, Smolke, Matthias, Posseckardt, Thomas, Hupka, Frank
Year of Publication 06.12.2011
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Year of Publication 06.12.2011
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Transport device with a monitoring appliance and substrate treatment apparatus
STRUEMPFEL JOHANNES, BAUER REINHARDT, HUPKA FRANK, POSSECKARDT THOMAS, HEISIG ANDREAS, SMOLKE MATTHIAS
Year of Publication 06.12.2011
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Year of Publication 06.12.2011
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Method for loading and unloading a transport device
STRUEMPFEL JOHANNES, SCHWERDTFEGER FALK, HECHT HANSRISTIAN, ULBRICHT ANDRE, BAUER REINHARDT, HEISIG ANDREWAS, RICHTER HEIKO, FREITAG HARTMUT
Year of Publication 11.10.2011
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Year of Publication 11.10.2011
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