Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices
Park, Jangryul, Choi, Youngsun, Kwon, Soonyang, Lee, Youngjun, Kim, Jiwoong, Kim, Jae-joon, Lee, Jihye, Ahn, Jeongho, Kwak, Hidong, Yang, Yusin, Jo, Taeyong, Lee, Myungjun, Kim, Kwangrak
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Published in Light, science & applications (28.05.2024)
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Automatic beam optimization method for scanning electron microscopy based on electron beam Kernel estimation
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Published in Communications engineering (20.06.2024)
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Measurement of 3D Printed Structure Using a Peak Detection Method in Dispersive Interferometry
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Published in Journal of electronic materials (01.03.2015)
Published in Journal of electronic materials (01.03.2015)
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Journal Article
METHOD OF TRAINING DEEP LEARNING MODEL FOR PREDICTING PATTERN CHARACTERISTICS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
YUN, Kyungwon, BYOUN, Seunggun, BAE, Yoonsung, GWAK, Seungho, JO, Taeyong, KIM, Kwangrak, SHIN, Younghoon, LEE, Chiyoung, SONG, Gilwoo
Year of Publication 21.04.2022
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Year of Publication 21.04.2022
Patent
substrate processing apparatus
BAE YOONSUNG, KIM INHO, CHOI DOOCHUL, CHOI INSOO, LIM SEUNGKYU, KIM TAEJOONG, PARK SANGGIL, JO TAEYONG, KANG YOUNGIL
Year of Publication 31.05.2021
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Year of Publication 31.05.2021
Patent