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THIN-FILM FORMATION METHOD AND THIN-FILM FORMATION DEVICE
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Year of Publication 14.08.2013
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Year of Publication 02.09.2015
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Year of Publication 19.04.2013
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Year of Publication 04.04.2013
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Year of Publication 15.04.2015
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Year of Publication 31.10.2012
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Year of Publication 19.11.2014
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