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BOONMAN MARCUS EMILE J, CASTENMILLER THOMAS JOSEPHUS M, JEUNINK ANDRE B, OTTENS JOOST J
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Year of Publication 10.05.2007
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Modification of an image of a pattern during an imaging process
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Year of Publication 22.09.2005
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Year of Publication 22.09.2005
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Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby
SETIJA IRWAN D, DEN BOEF ARIE J, DIRNSTORFER INGO, LEVASIER LEON M, TOLSMA HOITE P.T, PELLEMANS HENRICUS P.M, KRUIJSWIJK STEFAN G, JEUNINK ANDRE B
Year of Publication 07.07.2005
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Year of Publication 07.07.2005
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Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus
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Year of Publication 01.06.2006
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Year of Publication 01.06.2006
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Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
TEL WIM T, VAN DER HOFF ALEXANDER HENDRIKUS M, COMMISSARIS FRANCISCUS ANTONIUS C.M, VAN DE STADT ARNOUT, VAN DIJK REMCO M, AKHSSAY M'HAMED, JEUNINK ANDRE B, DE GROOT SIMON, BASELMANS JOHANNES J.M
Year of Publication 12.01.2006
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Year of Publication 12.01.2006
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Alignment systems and methods for lithographic systems
HUIJBREGTSE JEROEN, BURGHOORN JACOBUS, SCHETS SICCO I, BOK LEE BRIAN Y, VAN HORSSEN HERMANUS G, JEUNINK ANDRE B, MEGENS HENRY, VAN BILSEN FRANCISCUS B.M, GERTRUDUS SIMONS HUBERTUS J, SCHUURHUIS JOHNY R, DUNBAR ALLAN R, FRANCISCUS VAN HAREN RICHARD J, THEODOOR TOLSMA HOITE P, Y KOREN RAMON N, HINNEN PAUL C
Year of Publication 02.08.2007
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Year of Publication 02.08.2007
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Alignment systems and methods for lithographic systems
TOLSMA HOITE PIETER T, HUIJBREGTSE JEROEN, BURGHOORN JACOBUS, SCHETS SICCO I, VAN HORSSEN HERMANUS G, JEUNINK ANDRE B, MEGENS HENRY, VAN BILSEN FRANCISCUS B.M, SIMONS HUBERTUS JOHANNES G, SCHUURHUIS JOHNY R, DUNBAR ALLAN R, KOREN RAMON N.Y, VAN HAREN RICHARD JOHANNES F, LEE BRIAN Y.B, HINNEN PAUL C
Year of Publication 04.05.2006
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Year of Publication 04.05.2006
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Alignment systems and methods for lithographic systems
Y. KOREN RAMON N, HUIJBREGTSE JEROEN, BURGHOORN JACOBUS, SCHETS SICCO I, BOK LEE BRIAN Y, VAN HORSSEN HERMANUS G, JEUNINK ANDRE B, MEGENS HENRY, GERTRUDUS SIMONS HUBERTUS J, SCHUURHUIS JOHNY R, MARIA VAN BILSEN FRANCISCUS B, DUNBAR ALLAN R, FRANCISCUS VAN HAREN RICHARD J, THEODOOR TOLSMA HOITE P, HINNEN PAUL C
Year of Publication 27.04.2006
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Year of Publication 27.04.2006
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Alignment systems and methods for lithographic systems
HUIJBREGTSE JEROEN, SIMONS HUBERTUS J.G, BURGHOORN JACOBUS, SCHETS SICCO I, VAN HORSSEN HERMANUS G, JEUNINK ANDRE B, NAVARRO Y KOREN RAMON, MEGENS HENRY, VAN BILSEN FRANCISCUS B.M, SCHUURHUIS JOHNY R, DUNBAR ALLAN R, FRANCISCUS VAN HAREN RICHARD J, TOLSMA HOITE P.T, LEE BRIAN Y.B, HINNEN PAUL C
Year of Publication 20.04.2006
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Year of Publication 20.04.2006
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Alignment systems and methods for lithographic systems
HUIJBREGTSE JEROEN, BURGHOORN JACOBUS, SCHETS SICCO I, VAN HORSSEN HERMANUS G, JEUNINK ANDRE B, NAVARRO Y KOREN RAMON, MEGENS HENRY, VAN BILSEN FRANCISCUS B.M, GERTRUDUS SIMONS HUBERTUS J, SCHUURHUIS JOHNY R, DUNBAR ALLAN R, FRANCISCUS VAN HAREN RICHARD J, TOLSMA HOITE P.T, LEE BRIAN Y.B, HINNEN PAUL C
Year of Publication 20.04.2006
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Year of Publication 20.04.2006
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Alignment systems and methods for lithographic systems
HUIJBREGTSE JEROEN, BURGHOORN JACOBUS, SCHETS SICCO I, VAN HORSSEN HERMANUS G, JEUNINK ANDRE B, NAVARRO Y KOREN RAMON, MEGENS HENRY, VAN BILSEN FRANCISCUS B.M, GERTRUDUS SIMONS HUBERTUS J, SCHUURHUIS JOHNY R, DUNBAR ALLAN R, FRANCISCUS VAN HAREN RICHARD J, TOLSMA HOITE P.T, LEE BRIAN Y.B, HINNEN PAUL C
Year of Publication 20.04.2006
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Year of Publication 20.04.2006
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Alignment systems and methods for lithographic systems
HUIJBREGTSE JEROEN, SIMONS HUBERTUS J.G, BURGHOORN JACOBUS, SCHETS SICCO I, VAN HORSSEN HERMANUS G, JEUNINK ANDRE B, MEGENS HENRY, VAN BILSEN FRANCISCUS B.M, SCHUURHUIS JOHNY R, DUNBAR ALLAN R, TOLSMA HOITE P.T, VAN HAREN RICHARD JOHANNES F, Y KOREN RAMON N, LEE BRIAN Y.B, HINNEN PAUL C
Year of Publication 01.09.2005
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Year of Publication 01.09.2005
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