폴리실라잔계 실란트를 이용한 정전척 실링특성 향상 연구
최재영(Jaeyoung Choi), 박현수(Hyunsu Park), 손민규(Min Kyu Son), 정창오(Chang-oh Jeong), 김우병(Woo-Byoung Kim)
Published in Biuletyn Uniejowski (2016)
Published in Biuletyn Uniejowski (2016)
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Journal Article
Development of a new hybrid silicon thin-film transistor fabrication process
Cho, Sung Haeng, Choi, Yong Mo, Kim, Hyungjun, Jeong, Yu Gwang, Jeong, Chang-Oh, Kim, Shi Yul
Published in Journal of Information Display (01.03.2009)
Published in Journal of Information Display (01.03.2009)
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High-mobility material research for thin-film transistor with amorphous thallium-zinc-tin oxide semiconductor
Kishimoto, Katsushi, Lee, Dong-Hee, Kang, Iljoon, Jeong, Chang-Oh, Ishikawa, Yasuaki, Kong, Hyang-Shik
Published in Japanese Journal of Applied Physics (01.10.2015)
Published in Japanese Journal of Applied Physics (01.10.2015)
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Journal Article
Direct contact of indium tin oxide layer to Al(Ni) alloy electrodes for a-Si:H thin film transistors: Effects of Ni alloying on interfacial oxide growth and contact resistance
Han, Dooman, Jeong, Kyunghoon, Nam, Ho-Seok, Lee, Konbae, Lee, Jaegab, Jeong, Chang-Oh, Bae, Yangho
Published in Thin solid films (01.11.2013)
Published in Thin solid films (01.11.2013)
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Journal Article
Conference Proceeding
In situ study of stress relaxation mechanisms of pure Al thin films during isothermal annealing
Hwang, Soo-Jung, Lee, Yong-Duck, Park, Young-Bae, Lee, Je-Hun, Jeong, Chang-Oh, Joo, Young-Chang
Published in Scripta materialia (01.06.2006)
Published in Scripta materialia (01.06.2006)
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Journal Article
DC DC PORT FOR HIGH VOLTAGE ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK HAVING THE SAME
JEONG CHANG OH, SON MIN KYU, LEE YOUN YONG, LEE JAE HEUNG, SONG SEOK WON
Year of Publication 15.07.2019
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Year of Publication 15.07.2019
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