Blank mask, photomask and manufacturing method of semiconductor component
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Year of Publication 01.07.2023
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ROHLINGSMASKE UND FOTOMASKE MIT DIESER MASKE
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Year of Publication 30.06.2022
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Year of Publication 30.06.2022
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MASKENROHLING UND FOTOMASKE ZUR VERWENDUNG DIESES MASKENROHLINGS
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Year of Publication 30.06.2022
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Year of Publication 30.06.2022
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Laminate for blank mask and manufacturing method for the same
CHOI, SUK-YOUNG, LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SU-HYEON, KIM, SEONG-YOON, JEONG, MIN-GYO, CHO, HA-HYEON, SON, SUNG-HOON, KIM, TAE-WAN
Year of Publication 01.06.2023
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Year of Publication 01.06.2023
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Blank mask and photomask using the same
LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, CHOI, SU-KYOUNG, JEONG, MIN-GYO, KIM, SEONG-YOON, KIM, SU-HYEON, CHO, HA-HYEON, SON, SUNG-HOON, KIM, TAE-WAN
Year of Publication 16.05.2023
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Year of Publication 16.05.2023
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Blank mask and photomask using the same
CHOI, SUK-YOUNG, LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SEONG-YOON, KIM, SU-HYEON, JEONG, MIN-GYO, CHO, HA-HYEON, SON, SUNG-HOON, KIM, TAE-WAN
Year of Publication 16.04.2023
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Year of Publication 16.04.2023
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Method for cleaning substrate for blank mask, substrate for blank mask and blank mask comprising the same
CHOI, SUK-YOUNG, LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SU-HYEON, KIM, SEONG-YOON, JEONG, MIN-GYO, CHO, HA-HYEON, SON, SUNG-HOON, KIM, TAE-WAN
Year of Publication 01.03.2023
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Year of Publication 01.03.2023
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Blank mask and photomask using the same
CHOI, SUK-YOUNG, LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SU-HYEON, KIM, SEONG-YOON, JEONG, MIN-GYO, CHO, HA-HYEON, SON, SUNG-HOON, KIM, TAE-WAN
Year of Publication 16.01.2023
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Year of Publication 16.01.2023
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Blank mask, photomask using the same and preparing method of blank mask
CHOI, SUK-YOUNG, LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SEONG-YOON, KIM, SU-HYEON, JEONG, MIN-GYO, CHO, HA-HYEON, SON, SUNG-HOON, KIM, TAE-WAN
Year of Publication 01.11.2022
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Year of Publication 01.11.2022
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Blank mask and photomask using the same
CHOI, SUK-YOUNG, RYU, JI-YEON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SEONG-YOON, KIM, SU-HYEON, JEONG, MIN-GYO, KIM, KYU-HUN, SON, SUNG-HOON
Year of Publication 01.08.2022
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Year of Publication 01.08.2022
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Blank mask and photomask using the same
CHOI, SUK-YOUNG, RYU, JI-YEON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SEONG-YOON, KIM, SU-HYEON, JEONG, MIN-GYO, KIM, KYU-HUN, SON, SUNG-HOON
Year of Publication 16.07.2022
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Year of Publication 16.07.2022
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