Blank mask and photomask using the same
LEE, HYUNG-JOO, KIM, SEONG YOON, JEONG, MIN GYO, CHOI, SUK YOUNG, KIM, KYUHUN, SHIN, INKYUN, RYU, JIYEON, KIM, SUHYEON, SON, SUNG HOON
Year of Publication 21.08.2023
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Year of Publication 21.08.2023
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Blank mask, photomask using the same and method of manufacturing semiconductor device
LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, CHOI, SU-KYOUNG, KIM, SEONG-YOON, JEONG, MIN-GYO, SON, SUNG-HOON, KIM, TAE-WAN
Year of Publication 16.07.2023
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Year of Publication 16.07.2023
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Photomask blank, photomask using the same and manufacturing method of semiconductor device
LEE, HYUNG-JOO, JEONG, MIN GYO, KIM, SEONG YOON, CHOI, SUK YOUNG, KIM, KYUHUN, SHIN, INKYUN, KIM, SUHYEON, SON, SUNG HOON
Year of Publication 21.06.2023
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Year of Publication 21.06.2023
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Blank mask, photomask using the same and method of manufacturing semiconductor device
CHOI, SUK-YOUNG, LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SU-HYEON, KIM, SEONG-YOON, JEONG, MIN-GYO, SON, SUNG-HOON
Year of Publication 16.05.2023
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Year of Publication 16.05.2023
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BLANK MASK, PHOTOMASK USING THE SAME AND PREPARING METHOD OF BLANK MASK
LEE, HYUNG-JOO, KIM, SEONG YOON, JEONG, MIN GYO, CHOI, SUK YOUNG, LEE, GEONGON, SHIN, INKYUN, KIM, TAEWAN, KIM, SUHYEON, CHO, HAHYEON, SON, SUNG HOON
Year of Publication 21.04.2023
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Year of Publication 21.04.2023
Patent
Blank mask and photomask using the same
CHOI, SUK-YOUNG, LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SEONG-YOON, JEONG, MIN-GYO, SON, SUNG-HOON, KIM, TAE-WAN
Year of Publication 16.03.2023
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Year of Publication 16.03.2023
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Rohmaske und Fotomaske unter Verwendung derselben
Choi, Suk Young, Shin, Inkyun, Lee, Hyung-joo, Son, Sung Hoon, Kim, Seong Yoon, Kim, Taewan, Jeong, Min Gyo, Lee, GeonGon
Year of Publication 09.03.2023
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Year of Publication 09.03.2023
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Verfahren zum Reinigen eines Substrats für eine Rohmaske, Substrat für eine Rohmaske und eine das Substrat umfassende Rohmaske
Choi, Suk Young, Shin, Inkyun, Lee, Hyung-joo, Son, Sung Hoon, Kim, Seong Yoon, Kim, Taewan, Kim, Suhyeon, Jeong, Min Gyo, Lee, GeonGon, Cho, Hahyeon
Year of Publication 23.02.2023
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Year of Publication 23.02.2023
Patent
Photomask blank, photomask and method of fabricating a semiconductor element
CHOI, SUK-YOUNG, LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SEONG-YOON, JEONG, MIN-GYO, SON, SUNG-HOON
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
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Blank mask, photomask and fabrication method of semiconductor device
LEE, GEON-GON, KIM, TAE-YOUNG, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SU-HYEON, KIM, SEONG-YOON, JEONG, MIN-GYO, SON, SUNG-HOON, KIM, TAE-WAN
Year of Publication 01.01.2024
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Year of Publication 01.01.2024
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ROHMASKE UND FOTOMASKE UNTER VERWENDUNG DIESER ROHMASKE
Choi, Suk Young, Shin, Inkyun, Lee, Hyung-joo, Son, Sung Hoon, Kim, Seong Yoon, Kim, Taewan, Kim, Suhyeon, Jeong, Min Gyo, Lee, GeonGon, Cho, Hahyeon
Year of Publication 19.01.2023
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Year of Publication 19.01.2023
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ROHMASKE UND FOTOMASKE UNTER VERWENDUNG DIESER ROHMASKE
Choi, Suk Young, Shin, Inkyun, Lee, Hyung-joo, Son, Sung Hoon, Kim, Seong Yoon, Kim, Taewan, Kim, Suhyeon, Jeong, Min Gyo, Lee, GeonGon, Cho, Hahyeon
Year of Publication 08.12.2022
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Year of Publication 08.12.2022
Patent
Blank mask, photomask using the same, and manufacture method of semiconductor device
CHOI, SUK-YOUNG, LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SEONG-YOON, JEONG, MIN-GYO, SON, SUNG-HOON
Year of Publication 01.12.2022
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Year of Publication 01.12.2022
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FOTOLEERMASKE UND FOTOMASKE MIT DIESER MASKE
Choi, Suk Young, Shin, Inkyun, Kim, Kyuhun, Lee, Hyung-joo, Son, Sung Hoon, Kim, Seong Yoon, Jeong, Min Gyo, Kim, Suhyeon
Year of Publication 03.11.2022
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Year of Publication 03.11.2022
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LEERE MASKE UND FOTOMASKE MIT DIESER MASKE
Choi, Suk Young, Shin, Inkyun, Lee, Hyung-joo, Son, Sung Hoon, Kim, Seong Yoon, Kim, Taewan, Kim, Suhyeon, Jeong, Min Gyo, Lee, GeonGon, Cho, Hahyeon
Year of Publication 03.11.2022
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Year of Publication 03.11.2022
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Blank mask
CHOI, SUK-YOUNG, RYU, JI-YEON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SEONG-YOON, KIM, SU-HYEON, JEONG, MIN-GYO, KIM, KYU-HUN, SON, SUNG-HOON
Year of Publication 16.08.2023
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Year of Publication 16.08.2023
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Preparation method of laminate and laminate for optical use
CHOI, SUK-YOUNG, LEE, GEON-GON, LEE, HYUNG-JOO, SHIN, IN-KYUN, KIM, SU-HYEON, KIM, SEONG-YOON, JEONG, MIN-GYO, CHO, HA-HYEON, SON, SUNG-HOON, KIM, TAE-WAN
Year of Publication 01.07.2023
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Year of Publication 01.07.2023
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