Analysis of thin thermal oxides on (0001) SiC epitaxial layers
Woerle, Judith, Camarda, Massimo, Schneider, Christof W., Sigg, Hans, Grossner, Ulrike, Gobrecht, Jens
Published in 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM) (15.05.2017)
Published in 2016 European Conference on Silicon Carbide & Related Materials (ECSCRM) (15.05.2017)
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Conference Proceeding
Journal Article
Surface patterned polymer micro-cantilever arrays for sensing
Urwyler, Prabitha, Schift, Helmut, Gobrecht, Jens, Häfeli, Oskar, Altana, Mirco, Battiston, Felice, Müller, Bert
Published in Sensors and actuators. A. Physical. (01.12.2011)
Published in Sensors and actuators. A. Physical. (01.12.2011)
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Journal Article
Measurement of demolding forces in full wafer thermal nanoimprint
Trabadelo, Vera, Schift, Helmut, Merino, Santos, Bellini, Sandro, Gobrecht, Jens
Published in Microelectronic engineering (01.05.2008)
Published in Microelectronic engineering (01.05.2008)
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Journal Article
Conference Proceeding
High-resolution and large-area nanoparticle arrays using EUV interference lithographyElectronic supplementary information (ESI) available: Multiple-beam EUV interference lithography using HSQ gratings with footing (S1); EUV-IL using ATL with HSQ gratings (S2). See DOI: 10.1039/c5nr00565e
Karim, Waiz, Tschupp, Simon Andreas, Oezaslan, Mehtap, Schmidt, Thomas J, Gobrecht, Jens, van Bokhoven, Jeroen A, Ekinci, Yasin
Year of Publication 09.04.2015
Year of Publication 09.04.2015
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Journal Article
20 nm Line/space patterns in HSQ fabricated by EUV interference lithography
Ekinci, Yasin, Solak, Harun H., Padeste, Celestino, Gobrecht, Jens, Stoykovich, Mark P., Nealey, Paul F.
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Journal Article
Conference Proceeding
Nano-Mechanical Transduction of Polymer Micro-Cantilevers to Detect Bio-Molecular Interactions
Urwyler, Prabitha, Köser, Joachim, Schift, Helmut, Gobrecht, Jens, Müller, Bert
Published in Biointerphases (01.12.2012)
Published in Biointerphases (01.12.2012)
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Journal Article
pH Response of Silicon Nanowire Sensors: Impact of Nanowire Width and Gate Oxide
Bedner, Kristine, Guzenko, Vitaliy Anatolijovic, Tarasov, Alexey, Wipf, Mathias, Stoop, Ralph Lukas, Just, David, Rigante, Sara, Fu, Wangyang, Minamisawa, Renato Amaral, David, Christian, Calame, Michel, Gobrecht, Jens, Schonenberger, Christian
Published in Sensors and materials (01.01.2013)
Published in Sensors and materials (01.01.2013)
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Journal Article
Replication of Micro- and Nanostructures on Polymer Surfaces
Holzer, Clemens, Gobrecht, Jens, Schift, Helmut, Solak, Harun
Published in Macromolecular symposia. (01.10.2010)
Published in Macromolecular symposia. (01.10.2010)
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Journal Article
Perforated polymer membranes fabricated by nanoimprint
Schift, Helmut, Bellini, Sandro, Gobrecht, Jens
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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Journal Article
Conference Proceeding
Anti-adhesive layers on nickel stamps for nanoimprint lithography
Park, Sunggook, Schift, Helmut, Padeste, Celestino, Schnyder, Bernhard, Kötz, Rüdiger, Gobrecht, Jens
Published in Microelectronic engineering (01.06.2004)
Published in Microelectronic engineering (01.06.2004)
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Journal Article
Fast heating and cooling in nanoimprint using a spring-loaded adapter in a preheated press
Schift, Helmut, Bellini, Sandro, Gobrecht, Jens, Reuther, Frank, Kubenz, Mike, Mikkelsen, Morten Bo, Vogelsang, Konrad
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Journal Article
Conference Proceeding
Disposable polymeric micro-cantilever arrays for sensing
Urwyler, Prabitha, Häfeli, Oskar, Schift, Helmut, Gobrecht, Jens, Battiston, Felice, Müller, Bert
Published in Procedia engineering (2010)
Published in Procedia engineering (2010)
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Journal Article
Chemical patterning of sub-50-nm half pitches via nanoimprint lithography
Park, Sunggook, Saxer, Sina, Padeste, Celestino, Solak, Harun H., Gobrecht, Jens, Schift, Helmut
Published in Microelectronic engineering (01.03.2005)
Published in Microelectronic engineering (01.03.2005)
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Conference Proceeding
Optimized staircase profiles for diffractive optical devices made from absorbing materials
Nöhammer, Bernd, David, Christian, Gobrecht, Jens, Herzig, Hans Peter
Published in Optics letters (01.07.2003)
Published in Optics letters (01.07.2003)
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Journal Article
Hybrid bendable stamp copies for molding fabricated by nanoimprint lithography
Schift, Helmut, Park, Sunggook, Gobrecht, Jens, Meier, Fabian, Raupach, Werner, Vogelsang, Konrad
Published in Microelectronic engineering (01.03.2005)
Published in Microelectronic engineering (01.03.2005)
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Conference Proceeding