Patterning device cooling system and method of thermally conditioning a patterning device
Van Boxtel, Frank Johannes Jacobus, Van Haren, Richard Johannes Franciscus, Cekli, Hakki Ergün, Van Damme, Jean-Philippe Xavier, Nakibo{hacek over (g)}lu, Güneş
Year of Publication 03.12.2019
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Year of Publication 03.12.2019
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Patterning device cooling apparatus
Schultz, Geoffrey Alan, Van Boxtel, Frank Johannes Jacobus, Baker, Lowell Lane, Cekli, Hakki Ergün, Ward, Christopher Charles, Nakíbo{hacek over (g)}lu, Güneş, Van Bokhoven, Laurentius Johannes Adrianus, Van Damme, Jean-Philippe Xavier, Bloks, Ruud Hendrikus Martinus Johannes
Year of Publication 05.05.2020
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Year of Publication 05.05.2020
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PATTERNING DEVICE COOLING APPARATUS
Baker, Lowell Lane, BLOKS, Ruud Hendrikus Martinus Johannes, SCHULTZ, Geoffrey Alan, CEKLI, Hakki Ergun, VAN DAMME, Jean-Philippe Xavier, NAKÍBOGLU, Günes, VAN BOKHOVEN, Laurentius Johannes Adrianus, WARD, Christopher Charles, VAN BOXTEL, Frank Johannes Jacobus
Year of Publication 14.11.2019
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Year of Publication 14.11.2019
Patent
PATTERNING DEVICE COOLING APPARATUS
BAKER, Lowell Lane, BLOKS, Ruud Hendrikus Martinus Johannes, SCHULTZ, Geoffrey Alan, CEKLI, Hakki Ergün, VAN DAMME, Jean-Philippe Xavier, VAN BOKHOVEN, Laurentius Johannes Adrianus, WARD, Christopher Charles, NAKIBOGLU, Günes, VAN BOXTEL, Frank Johannes Jacobus
Year of Publication 25.04.2019
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Year of Publication 25.04.2019
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LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC PROJECTION METHOD
VAN DAMME Jean-Philippe Xavier, VAN DE RUIT Kevin, PAARHUIS Bart Dinand, ONVLEE Johannes, KRAMER Pieter Jacob, BROUWER Cornelis Melchior
Year of Publication 05.04.2018
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Year of Publication 05.04.2018
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Scanning Measurement System
ROBBERT JAN VOOGD, ROLAND JOHANNES WILHELMUS STAS, JEAN-PHILIPPE XAVIER VAN DAMME, JOHANNES JACOBUS MATHEUS BASELMANS, BEARRACH MOEST
Year of Publication 30.03.2017
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Year of Publication 30.03.2017
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SCANNING MEASUREMENT SYSTEM
VAN DAMME, Jean-Philippe, Xavier, STAS, Roland, Johannes, Wilhelmus, BASELMANS, Johannes, Jacobus, Matheus, MOEST, Bearrach, VOOGD, Robbert Jan
Year of Publication 30.03.2017
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Year of Publication 30.03.2017
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Patterning device support and lithographic apparatus
Harris Duncan, Van Damme Jean-Philippe Xavier, Sinharoy Arindam, Burbank Daniel Nathan, Schuster Mark Josef, Ward Christopher Charles, Roux Stephen S
Year of Publication 22.08.2017
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Year of Publication 22.08.2017
Patent
Patterning device cooling apparatus
Schultz, Geoffrey Alan, Van Boxtel, Frank Johannes Jacobus, Baker, Lowell Lane, Cekli, Hakki Ergün, Ward, Christopher Charles, Nak{dot over (i)}bo{hacek over (g)}lu, Güneş, Van Bokhoven, Laurentius Johannes Adrianus, Van Damme, Jean-Philippe Xavier, Bloks, Ruud Hendrikus Martinus Johannes
Year of Publication 27.08.2019
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Year of Publication 27.08.2019
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