Substrate processing apparatus
Park, Kyung Seok, Je, Sung Tae, Choi, Kyu Jin, Ku, Ja Dae, Kim, Jun, Jung, Bong Ju, Yoo, Cha Young, Kim, Yong Ki, Kim, Jae Woo
Year of Publication 01.11.2022
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Year of Publication 01.11.2022
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Showerhead and substrate processing apparatus including the same
Kang, Woo Young, Je, Sung Tae, Lee, Jae Ho, Yun, Chang Hoon, Park, Chan Yong, Jang, Gil Sun, Lim, Han June
Year of Publication 08.02.2022
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Year of Publication 08.02.2022
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Method for substrate processing using exhaust ports
Kim, Kyong-Hun, Yang, Il-Kwang, Je, Sung-Tae, Shin, Yang-Sik, Song, Byoung-Gyu, Kim, Yong-Ki
Year of Publication 17.03.2020
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Year of Publication 17.03.2020
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Substrate processing apparatus and method for assembling tube assembly
Park, Kyung Seok, Je, Sung Tae, Choi, Kyu Jin, Ku, Ja Dae, Kim, Jun, Jung, Bong Ju, Yoo, Cha Young, Kim, Yong Ki, Kim, Jae Woo
Year of Publication 17.11.2020
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Year of Publication 17.11.2020
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Substrate processing apparatus and substrate processing method using the same
Hyon, Jun Jin, Song, Byoung Gyu, Je, Sung Tae, Kim, Chang Dol, Kim, Kyong Hun, Kim, Yong Ki, Shin, Yang Sik, Kim, Jae Woo
Year of Publication 06.10.2020
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Year of Publication 06.10.2020
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Substrate processing apparatus
Park, Kyung Seok, Je, Sung Tae, Choi, Kyu Jin, Ku, Ja Dae, Kim, Jun, Jung, Bong Ju, Yoo, Cha Young, Kim, Yong Ki, Kim, Jae Woo
Year of Publication 30.07.2019
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Year of Publication 30.07.2019
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Substrate processing apparatus including heat-shield plate
Kim, Kyong-Hun, Yang, Il-Kwang, Je, Sung-Tae, Shin, Yang-Sik, Song, Byoung-Gyu, Kim, Yong-Ki
Year of Publication 24.04.2018
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Year of Publication 24.04.2018
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Substrate processing apparatus including exhaust ports and substrate processing method
Kim Kyong-Hun, Song Byoung-Gyu, Kim Yong-Ki, Yang Il-Kwang, Shin Yang-Sik, Je Sung-Tae
Year of Publication 23.01.2018
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Year of Publication 23.01.2018
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Substrate processing apparatus
Hyon, Jun Jin, Song, Byoung Gyu, Je, Sung Tae, Kim, Chang Dol, Kim, Kyoung Hun, Kim, Yong Ki, Shin, Yang Sik, Kim, Jae Woo
Year of Publication 25.12.2018
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Year of Publication 25.12.2018
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Substrate treatment apparatus, and method for controlling temperature of heater
Kim Kyong-Hun, Kim Myung-In, Lee Jae-Ho, Yang Il-Kwang, Shin Yang-Sik, Je Sung-Tae
Year of Publication 12.09.2017
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Year of Publication 12.09.2017
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Apparatus for processing substrate for supplying reaction gas having phase difference
Kim Kyong-Hun, Song Byoung-Gyu, Kim Yong-Ki, Yang Il-Kwang, Shin Yang-Sik, Je Sung-Tae
Year of Publication 11.04.2017
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Year of Publication 11.04.2017
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Substrate processing apparatus including auxiliary gas supply port
Kim Kyong-Hun, Song Byoung-Gyu, Kim Yong-Ki, Yang Il-Kwang, Shin Yang-Sik, Je Sung-Tae
Year of Publication 14.03.2017
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Year of Publication 14.03.2017
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