Deposition and permeation properties of SiNx/parylene multilayers on polymeric substrates
CHIANG, C. C, WUU, D. S, LIN, H. B, CHEN, Y. P, CHEN, T. N, LIN, Y. C, WU, C. C, CHEN, W. C, JAW, T. H, HORNG, R. H
Published in Surface & coatings technology (22.05.2006)
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