리소그래피 장치
BANINE VADIM YEVGENYEVICH, NIKIPELOV ANDREY, VAN DE KERKHOF MARCUS ADRIANUS, MOORS JOHANNES HUBERTUS JOSEPHINA, ACHANTA SATISH, JANSSENS STEF MARTEN JOHAN
Year of Publication 11.03.2022
Get full text
Year of Publication 11.03.2022
Patent
A PRESSURE CONTROL VALVE A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS
CUYPERS KOEN, SRIVASTAVA SUDHIR, SCHELLENS HENDRIKUS JOHANNES, RENCKENS THEODORUS JOHANNES ANTONIUS, LENSSEN BO, HEEREN ADRIANUS MARINUS WOUTER, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, JANSSENS STEF MARTEN JOHAN, CORTIE ROGIER HENDRIKUS MAGDALENA, GOSEN JEROEN GERARD
Year of Publication 29.06.2021
Get full text
Year of Publication 29.06.2021
Patent
압력 제어 밸브, 리소그래피 장치용 유체 핸들링 구조체 및 리소그래피 장치
CUYPERS KOEN, SRIVASTAVA SUDHIR, SCHELLENS HENDRIKUS JOHANNES, RENCKENS THEODORUS JOHANNES ANTONIUS, LENSSEN BO, HEEREN ADRIANUS MARINUS WOUTER, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, JANSSENS STEF MARTEN JOHAN, CORTIE ROGIER HENDRIKUS MAGDALENA, GOSEN JEROEN GERARD
Year of Publication 19.06.2019
Get full text
Year of Publication 19.06.2019
Patent
RECESS-BASED PICK AND PLACE FOR HETEROGENEOUS INTEGRATION
JANSSENS, Stef, Marten, Johan, PARAYIL VENUGOPALAN, Syam, DE JAGER, Pieter, Willem, Herman, WARNAAR, Patrick, JANSEN, Bas
Year of Publication 03.07.2024
Get full text
Year of Publication 03.07.2024
Patent
STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DEVICE MANUFACTURING METHOD
SCHOLTEN, Bert Dirk, TROMP, Siegfried Alexander, OVERSCHIE, Peter Mark, SPAAN-BURKE, Theresa Mary, JANSSENS, Stef Marten Johan, DONDERS, Sjoerd Nicolaas Lambertus, VAN DAM, Teunis
Year of Publication 23.05.2024
Get full text
Year of Publication 23.05.2024
Patent
Stage system, lithographic apparatus, method for positioning and device manufacturing method
Spaan-Burke, Theresa Mary, Tromp, Siegfried Alexander, Van Dam, Teunis, Janssens, Stef Marten Johan, Overschie, Peter Mark, Scholten, Bert Dirk, Donders, Sjoerd Nicolaas Lambertus
Year of Publication 02.01.2024
Get full text
Year of Publication 02.01.2024
Patent
A LITHOGRAPHIC APPARATUS
Achanta, Satish, Van De Kerkhof, Marcus Adrianus, Moors, Johannes Hubertus Josephina, Banine, Vadim Yevgenyevich, Janssens, Stef Marten Johan, Nikipelov, Andrey
Year of Publication 27.10.2022
Get full text
Year of Publication 27.10.2022
Patent
A PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, SCHELLENS, Hendrikus Johannes, GOSEN, Jeroen Gerard, HEEREN, Adrianus Marinus Wouter, CUYPERS, Koen, SRIVASTAVA, Sudhir, LENSSEN, Bo, EUMMELEN, Erik Henricus Egidius Catharina, JANSSENS, Stef Marten Johan, RENCKENS, Theodorus Johannes Antonius
Year of Publication 13.04.2022
Get full text
Year of Publication 13.04.2022
Patent
PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, SCHELLENS, Hendrikus Johannes, GOSEN, Jeroen Gerard, HEEREN, Adrianus Marinus Wouter, CUYPERS, Koen, SRIVASTAVA, Sudhir, LENSSEN, Bo, EUMMELEN, Erik Henricus Egidius Catharina, JANSSENS, Stef Marten Johan, RENCKENS, Theodorus Johannes Antonius
Year of Publication 10.03.2022
Get full text
Year of Publication 10.03.2022
Patent
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
Eummelen, Erik Henricus Egidius Catharina, Heeren, Adrianus Marinus Wouter, Schellens, Hendrikus Johannes, Lenssen, Bo, Janssens, Stef Marten Johan, Cuypers, Koen, Renckens, Theodorus Johannes Antonius, Srivastava, Sudhir, Gosen, Jeroen Gerard, Cortie, Rogier Hendrikus Magdalena
Year of Publication 14.12.2021
Get full text
Year of Publication 14.12.2021
Patent
STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DEVICE MANUFACTURING METHOD
SCHOLTEN, Bert Dirk, TROMP, Siegfried Alexander, OVERSCHIE, Peter Mark, SPAAN-BURKE, Theresa Mary, JANSSENS, Stef Marten Johan, DONDERS, Sjoerd Nicolaas Lambertus, VAN DAM, Teunis
Year of Publication 20.06.2019
Get full text
Year of Publication 20.06.2019
Patent
STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DEVICE MANUFACTURING METHOD
JANSSENS, Stef, Marten, Johan, OVERSCHIE, Peter, DONDERS, Sjoerd, Nicolaas, Lambertus, TROMP, Siegfried, Alexander, SPAAN-BURKE, Theresa, Mary, SCHOLTEN, Bert, Dirk, VAN DAM, Teunis
Year of Publication 08.05.2019
Get full text
Year of Publication 08.05.2019
Patent
A PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, SCHELLENS, Hendrikus Johannes, GOSEN, Jeroen Gerard, HEEREN, Adrianus Marinus Wouter, CUYPERS, Koen, SRIVASTAVA, Sudhir, LENSSEN, Bo, EUMMELEN, Erik Henricus Egidius Catharina, JANSSENS, Stef Marten Johan, RENCKENS, Theodorus Johannes Antonius
Year of Publication 06.02.2020
Get full text
Year of Publication 06.02.2020
Patent
A PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, SCHELLENS, Hendrikus Johannes, GOSEN, Jeroen Gerard, HEEREN, Adrianus Marinus Wouter, CUYPERS, Koen, SRIVASTAVA, Sudhir, LENSSEN, Bo, EUMMELEN, Erik Henricus Egidius Catharina, JANSSENS, Stef Marten Johan, RENCKENS, Theodorus Johannes Antonius
Year of Publication 28.08.2019
Get full text
Year of Publication 28.08.2019
Patent
STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DEVICE MANUFACTURING METHOD
SIEGFRIED ALEXANDER TROMP, PETER OVERSCHIE, SJOERD NICOLAAS LAMBERTUS DONDERS, STEF MARTEN JOHAN JANSSENS, BERT DIRK SCHOLTEN, TEUNIS VAN DAM, THERESA MARY SPAAN-BURKE
Year of Publication 09.01.2018
Get full text
Year of Publication 09.01.2018
Patent
STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DEVICE MANUFACTURING METHOD
JANSSENS, Stef, Marten, Johan, OVERSCHIE, Peter, DONDERS, Sjoerd, Nicolaas, Lambertus, TROMP, Siegfried, Alexander, SPAAN-BURKE, Theresa, Mary, SCHOLTEN, Bert, Dirk, VAN DAM, Teunis
Year of Publication 04.01.2018
Get full text
Year of Publication 04.01.2018
Patent
A PRESSURE CONTROL VALVE, A FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS
KOEN CUYPERS, ROGIER HENDRIKUS MAGDALENA CORTIE, JEROEN GERARD GOSEN, SUDHIR SRIVASTAVA, STEF MARTEN JOHAN JANSSENS, HENDRIKUS JOHANNES SCHELLENS, ADRIANUS MARINUS WOUTER HEEREN, ERIK HENRICUS EGIDIUS CATHARINA EUMMELEN, THEODORUS JOHANNES ANTONIUS RENCKENS, BO LENSSEN
Year of Publication 24.04.2018
Get full text
Year of Publication 24.04.2018
Patent
Stage system for worktable system
OVERSCHIE PETER, TROMP SIEGFRIED ALEXANDER, SCHOLTEN BERT D, VAN DAM TEUNIS, SPAAN-BURKE THERESA MARY, DONDERS SJOERD NICOLAAS LAMBERTUS, JANSSENS STEF MARTEN JOHAN
Year of Publication 08.10.2021
Get full text
Year of Publication 08.10.2021
Patent
A lithographic apparatus
VAN DE KERKHOF, MARCUS ADRIANUS, JANSSENS, STEF MARTEN JOHAN, NIKIPELOV, ANDREY, BANINE, VADIM YEVGENYEVICH, ACHANTA, SATISH, MOORS, JOHANNES HUBERTUS JOSEPHINA
Year of Publication 01.03.2021
Get full text
Year of Publication 01.03.2021
Patent
A pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus
RENCKENS, THEODORUS JOHANNES ANTONIUS, HEEREN, ADRIANUS MARINUS WOUTER, JANSSENS, STEF MARTEN JOHAN, GOSEN, JEROEN GERARD, SCHELLENS, HENDRIKUS JOHANNES, LENSSEN, BO, CUYPERS, KOEN, CORTIE, ROGIER HENDRIKUS MAGDALENA, SRIVASTAVA, SUDHIR, EUMMELEN, ERIK HENRICUS EGIDIUS CATHARINA
Year of Publication 01.03.2020
Get full text
Year of Publication 01.03.2020
Patent