METHODS APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS LITHOGRAPHIC PROCESSING SYSTEM INCLUDING DIAGNOSTIC APPARATUS
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Year of Publication 03.07.2019
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Year of Publication 03.07.2019
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METHODS APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS LITHOGRAPHIC PROCESSING SYSTEM INCLUDING DIAGNOSTIC APPARATUS
HAUPTMANN MARC, DAVIES DYLAN JOHN DAVID, TSUGAMA NAOKO, VIEYRA SALAS JORGE ALBERTO, JANSSEN PAUL, JANSSEN EDWIN JOHANNES MARIA, HOEKERD KORNELIS TIJMEN, BRULS RICHARD JOSEPH, VAN DER WILK RONALD, VAN SCHIJNDEL ANTONIUS HUBERTUS, VAN DEN OEVER PETRUS JOHANNES
Year of Publication 26.07.2017
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Year of Publication 26.07.2017
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Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process
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Year of Publication 07.04.2020
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Year of Publication 07.04.2020
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METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS
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Year of Publication 18.07.2019
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Year of Publication 18.07.2019
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Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus
Van Den Oever, Petrus Johannes, Tsugama, Naoko, Janssen, Paul, Bruls, Richard Joseph, Hauptmann, Marc, Vieyra Salas, Jorge Alberto, Hoekerd, Kornelis Tijmen, Janssen, Edwin Johannes Maria, Van Der Wilk, Ronald, Van Schijndel, Antonius Hubertus, Davies, Dylan John David
Year of Publication 26.03.2019
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Year of Publication 26.03.2019
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METHOD & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS, LITHOGRAPHIC PROCESSING SYSTEM INCLUDING DIAGNOSTIC APPARATUS
JANSSEN Paul, DAVIES Dylan John David, HOEKERD Kornelis Tijmen, VAN SCHIJNDEL Antonius Hubertus, VIEYRA SALAS Jorge Alberto, JANSSEN Edwin Johannes Maria, BRULS Richard Joseph, VAN DER WILK Ronald, HAUPTMANN Marc, VAN DEN OEVER Petrus Johannes, TSUGAMA Naoko
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
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Optical focus error offset to reduce radial to vertical crosstalk
Janssen, Edwin Johannes Maria, Hoeven, Pieter, Looijmans, Hendrikus Albertus Johanna
Year of Publication 27.12.2011
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Year of Publication 27.12.2011
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Optical focus error offset to reduce radial to vertical crosstalk
HOEVEN PIETER, JANSSEN EDWIN JOHANNES MARIA, LOOIJMANS HENDRIKUS ALBERTUS JOHANNA
Year of Publication 27.12.2011
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Year of Publication 27.12.2011
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METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO A LITHOGRAPHIC MANUFACTURING PROCESS, LITHOGRAPHIC PROCESSING SYSTEM INCLUDING DIAGNOSTIC APPARATUS
TSUGAMA, NAOKO, DAVIES, DYLAN,JOHN,DAVID, VAN DEN OEVER, PETRUS, JOHANNES, BRULS, RICHARD, JOSEPH, VAN DER WILK, RONALD, HOEKERD, KORNELIS, TIJMEN, HAUPTMANN, MARC, JANSSEN, PAUL, VAN SCHIJNDEL, ANTONIUS, HUBERTUS, JANSSEN, EDWIN, JOHANNES, MARIA, VIEYRA SALAS, JORGE, ALBERTO
Year of Publication 09.06.2016
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Year of Publication 09.06.2016
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OPTICAL FOCUS ERROR OFFSET TO REDUCE RADIAL TO VERTICAL CROSSTALK
HOEVEN PIETER, JANSSEN EDWIN JOHANNES MARIA, LOOIJMANS HENDRIKUS ALBERTUS JOHANNA
Year of Publication 26.11.2009
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Year of Publication 26.11.2009
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