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LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING LITHOGRAPHIC APPARATUS

by MIRANDA MARCIO ALEXANDRE CANO, NOORDAM LAMBERTUS DOMINICUS, JANSEN HANS, JORRITSMA LAURENTIUS CATRINUS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, SIEBE LANDHEER, MEESTER ARNOUT JOHANNES, VAN DER LEE MAURICE MARTINUS JOHANNES
Year of Publication 06.08.2015

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LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

by MIRANDA MARCIO ALEXANDRE CANO, JANSEN HANS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, MEESTER ARNOUT JOHANNES, LANDHEER SIEBE
Year of Publication 25.03.2010

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A CLEANING DEVICE, A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS CLEANING METHOD

A CLEANING DEVICE, A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS CLEANING METHOD

by WANTEN PETER FRANCISCUS, JANSEN HANS, DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS, JANSEN BAUKE, BEEREN RAYMOND GERARDUS MARIUS, HOEKERD KORNELIS TIJMEN, CUIJPERS JOHANNES WILHELMUS JACOBUS LEONARDUS, STAVENGA MARCO KOERT
Year of Publication 15.04.2010

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Lithographic apparatus and in-line cleaning apparatus

Lithographic apparatus and in-line cleaning apparatus

by De Graaf Roelof Frederik, Jansen Hans, Heusschen Hubertus Leonardus Franciscus, Jansen Bauke
Year of Publication 10.10.2017

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LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS

LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS

by DE GRAAF Roelof Frederik, HEUSSCHEN Hubertus Leonardus Franciscus, JANSEN Hans, JANSEN Bauke
Year of Publication 24.11.2016

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Lithographic apparatus and a method of operating the apparatus

Lithographic apparatus and a method of operating the apparatus

by Landheer, Siebe, Jansen, Bauke, Miranda, Marcio Alexandre Cano, Bruls, Richard Joseph, Tanasa, Gheorghe, Thomas, Ivo Adam Johannes, Jorritsma, Laurentius Catrinus, Noordam, Lambertus Dominicus, Van Der Lee, Maurice Martinus Johannes, Jansen, Hans, Meester, Arnout Johannes, Bruijstens, Jeroen Peter Johannes
Year of Publication 01.10.2019

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Patent

Lithographic apparatus and in-line cleaning apparatus

Lithographic apparatus and in-line cleaning apparatus

by De Graaf Roelof Frederik, Jansen Hans, Heusschen Hubertus Leonardus Franciscus, Jansen Bauke
Year of Publication 02.08.2016

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Patent

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

by Landheer, Siebe, Jansen, Bauke, Miranda, Marcio Alexandre Cano, Bruls, Richard Joseph, Tanasa, Gheorghe, Thomas, Ivo Adam Johannes, Jorritsma, Laurentinus Catrinus, Noordam, Lambertus Dominicus, Van Der Lee, Maurice Martinus Johannes, Jansen, Hans, Meester, Arnout Johannes, Bruijstens, Jeroen Peter Johannes
Year of Publication 21.03.2019

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Patent

Lithographic apparatus and a method of operating the apparatus

Lithographic apparatus and a method of operating the apparatus

by Landheer, Siebe, Jansen, Bauke, Miranda, Marcio Alexandre Cano, Bruls, Richard Joseph, Tanasa, Gheorghe, Thomas, Ivo Adam Johannes, Jorritsma, Laurentius Catrinus, Noordam, Lambertus Dominicus, Van Der Lee, Maurice Martinus Johannes, Jansen, Hans, Meester, Arnout Johannes, Bruijstens, Jeroen Peter Johannes
Year of Publication 11.12.2018

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LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS

LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS

by JANSEN HANS, JANSEN BAUKE, DE GRAAF ROELOF FREDERIK, HEUSSCHEN HUBERTUS LEONARDUS FRANCISCUS
Year of Publication 12.11.2015

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Patent

Lithographic apparatus and in-line cleaning apparatus

Lithographic apparatus and in-line cleaning apparatus

by JANSEN HANS, JANSEN BAUKE, DE GRAAF ROELOF FREDERIK, HEUSSCHEN HUBERTUS LEONARDUS FRANCISCUS
Year of Publication 19.05.2015

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LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

by MIRANDA MARCIO ALEXANDRE CANO, NOORDAM LAMBERTUS DOMINICUS, JANSEN HANS, JORRITSMA LAURENTIUS CATRINUS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, MEESTER ARNOUT JOHANNES, VAN DER LEE MAURICE MARTINUS JOHANNES, LANDHEER SIEBE
Year of Publication 05.05.2016

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LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS

LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS

by JANSEN HANS, JANSEN BAUKE, DE GRAAF ROELOF FREDERIK, HEUSSCHEN HUBERTUS LEONARDUS FRANCISCUS
Year of Publication 08.11.2012

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Patent

Lithographic apparatus and in-line cleaning apparatus

Lithographic apparatus and in-line cleaning apparatus

by JANSEN HANS, JANSEN BAUKE, DE GRAAF ROELOF FREDERIK, HEUSSCHEN HUBERTUS LEONARDUS FRANCISCUS
Year of Publication 14.08.2012

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Patent

Lithographic apparatus and in-line cleaning apparatus

Lithographic apparatus and in-line cleaning apparatus

by De Graaf, Roelof Frederik, Jansen, Hans, Jansen, Bauke, Heusschen, Hubertus Leonardus Franciscus
Year of Publication 14.08.2012

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Patent

Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure

Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure

by MIRANDA MARCIO ALEXANDRE CANO, NOORDAM LAMBERTUS DOMINICUS, JANSEN HANS, JORRITSMA LAURENTIUS CATRINUS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, MEESTER ARNOUT JOHANNES, VAN DER LEE MAURICE MARTINUS JOHANNES, LANDHEER SIEBE
Year of Publication 03.11.2015

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Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure

Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure

by MIRANDA MARCIO ALEXANDRE CANO, JANSEN HANS, BRUIJSTENS JEROEN PETER JOHANNES, JANSEN BAUKE, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, BRULS RICHARD JOSEPH, MEESTER ARNOUT JOHANNES, LANDHEER SIEBE
Year of Publication 20.05.2014

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Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method

Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method

by WANTEN PETER FRANCISCUS, JANSEN HANS, DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS, JANSEN BAUKE, BEEREN RAYMOND GERARDUS MARIUS, HOEKERD KORNELIS TIJMEN, CUIJPERS JOHANNES WILHELMUS JACOBUS LEONARDUS, STAVENGA MARCO KOERT
Year of Publication 21.04.2015

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Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method

Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method

by WANTEN PETER FRANCISCUS, JANSEN HANS, DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS, JANSEN BAUKE, BEEREN RAYMOND GERARDUS MARIUS, HOEKERD KORNELIS TIJMEN, CUIJPERS JOHANNES WILHELMUS JACOBUS LEONARDUS, STAVENGA MARCO KOERT
Year of Publication 03.02.2015

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Lithographic apparatus and a method of operating the apparatus

Lithographic apparatus and a method of operating the apparatus

by JANSEN HANS, VAN DER NET ANTONIUS JOHANNUS, JANSEN BAUKE, KRAMER PIETER JACOB, BRULS RICHARD JOSEPH, MARTENS ARJAN HUBRECHT JOSEF ANNA, CASIMIRI ERIC WILLEM FELIX, KUIJPER ANTHONIE
Year of Publication 22.10.2013

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