PLASMA ENHANCED ATOMIC LAYER DEPOSITION WITH PULSED PLASMA EXPOSURE
JANJAM SATHISH BABU S.V, HENRI JON, SIMS JAMES S, TANG SHANE, KELCHNER KATHRYN M
Year of Publication 08.07.2015
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Year of Publication 08.07.2015
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PLASMA ENHANCED ATOMIC LAYER DEPOSITION WITH PULSED PLASMA EXPOSURE
TANG, SHANE, JANJAM, SATHISH BABU S.V, SIMS, JAMES S, HENRI, JON, KELCHNER, KATHRYN M
Year of Publication 30.07.2015
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Year of Publication 30.07.2015
Patent
Plasma enhanced atomic layer deposition with pulsed plasma exposure
TANG, SHANE, JANJAM, SATHISH BABU S.V, SIMS, JAMES S, HENRI, JON, KELCHNER, KATHRYN M
Year of Publication 21.03.2019
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Year of Publication 21.03.2019
Patent
Plasma enhanced atomic layer deposition with pulsed plasma exposure
TANG, SHANE, JANJAM, SATHISH BABU S.V, SIMS, JAMES S, HENRI, JON, KELCHNER, KATHRYN M
Year of Publication 16.08.2015
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Year of Publication 16.08.2015
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