APPARATUS FOR DEPOSITING THIN FILM TO QUICKLY EXHAUST RESIDUAL PROCESS GAS AND BYPRODUCT
PARK, YOUNG HOON, LEE, SANG KYU, JANG, HO SEUNG, SEO, TAE WOOK, HWANG, HUI, SEO, KANG JIN, LIM, HONG JOO
Year of Publication 02.08.2004
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Year of Publication 02.08.2004
Patent