Method for manufacturing semiconductor device
JANG, YUN KYEONG, HWANG, DONG HOON, KIM, SANG JIN, OH, SE BEOM, KWON, TAE YONG
Year of Publication 06.12.2017
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Year of Publication 06.12.2017
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Analysis of Process Parameters to Improve On-Chip Linewidth Variation
Jang, Yun-Kyeong, Lee, Doo-Youl, Lee, Sung-Woo, Lee, Eun-Mi, Choi, Soo-Han, Kang, Yool, Yeo, Gi-Sung, Woo, Sang-Gyun, Cho, Han-Ku, Park, Jong-Rak
Published in Journal of semiconductor technology and science (2004)
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Published in Journal of semiconductor technology and science (2004)
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Semiconductor device and method for fabricating the same
JANG, YUN KYEONG, PARK, DONG WOON, YANG, CHANG JAE, PARK, JOON SOO, YOON, KWANG SUB, KIM, SANG JIN, JUE, HYE KYOUNG
Year of Publication 04.01.2018
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Year of Publication 04.01.2018
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APPARATUS FOR LITHOGRAPY AND METHOD FOR CLEANING OF THE SAME
JANG, YUN KYEONG, PARK, JIN HONG, LEE, HYUN HOON, KIM, SUNG JOO, SEO, DO HYUN
Year of Publication 14.12.2016
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Year of Publication 14.12.2016
Patent
AFM nanolithography on a mixed LB film of hexadecylamine and palmitic acid
Ahn, Sang Jung, Jang, Yun Kyeong, Kim, Seung Ae, Lee, Haeseong, Lee, Haiwon
Published in Ultramicroscopy (01.05.2002)
Published in Ultramicroscopy (01.05.2002)
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Journal Article
Conference Proceeding
Exposure apparatus and method for cleaning the same
Park, Jinhong, Seo, Dohyun, Lee, HyunHoon, Kim, Sungjoo, Jang, Yun kyeong
Year of Publication 01.01.2019
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Year of Publication 01.01.2019
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Semiconductor device and method for fabricating the same
Kim, Sang Jin, Jue, Hye Kyoung, Park, Joon Soo, Jang, Yun Kyeong, Yang, Chang Jae, Park, Dong Woon, Yoon, Kwang Sub
Year of Publication 04.02.2020
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Year of Publication 04.02.2020
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SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
YOON Kwang Sub, JANG Yun Kyeong, PARK Dong Woon, KIM Sang Jin, PARK Joon Soo, JUE Hye Kyoung, YANG Chang Jae
Year of Publication 28.12.2017
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Year of Publication 28.12.2017
Patent
Semiconductor device and method for fabricating the same
YOON,KWANG SUB, PARK,DONG WOON, JANG,YUN KYEONG, YANG,CHANG JAE, PARK,JOON SOO, JUE,HYE KYOUNG, KIM,SANG JIN
Year of Publication 05.01.2018
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Year of Publication 05.01.2018
Patent
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
YOON, JIN YOUNG, JANG, YUN KYEONG, KANG, YOOL, LEE, JEONG HOON, LEE, SUK JOO
Year of Publication 29.04.2008
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Year of Publication 29.04.2008
Patent
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
YOON, JIN YOUNG, KIM, HYUN WOO, JANG, YUN KYEONG, KANG, YOOL, YI, SHI YONG, CHOI, SANG JUN
Year of Publication 16.07.2008
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Year of Publication 16.07.2008
Patent
METHOD OF USING BLOCK COPOLYMER TO FORM FINE PATTERN OF SEMICONDUCTOR DEVICE
KIM KYOUNG-TAEK, JANG YUN-KYEONG, NA HAI-SUB, KIM HYUN-WOO, YI SHI-YONG, YOON DONG KI
Year of Publication 13.08.2009
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Year of Publication 13.08.2009
Patent
METHOD OF FORMING FINE PATTERN USING BLOCK COPOLYMER
KIM, HYUN WOO, JANG, YUN KYEONG, YOON, DONG KI, YI, SHI YONG, KIM, KYOUNG TAEK, NA, HAI SUB
Year of Publication 03.08.2009
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Year of Publication 03.08.2009
Patent