Crystallization of hafnium-oxide-based ferroelectrics for BEOL integration
Frank, Martin M., Cartier, Eduard A., Lavoie, Christian, Carr, Adra, Jordan-Sweet, Jean L., Jamison, Paul C., Gluschenkov, Oleg, Rozen, John, Narayanan, Vijay
Published in 2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (06.03.2022)
Published in 2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (06.03.2022)
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Conference Proceeding
SiO2 Free HfO2 Gate Dielectrics by Physical Vapor Deposition
Jamison, Paul C., Tsunoda, Takaaki, Tuan Anh Vo, Juntao Li, Jagannathan, Hemanth, Shinde, Sanjay R., Paruchuri, Vamsi K., Gall, Daniel
Published in IEEE transactions on electron devices (01.09.2015)
Published in IEEE transactions on electron devices (01.09.2015)
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Journal Article
BEOL Compatible High-Capacitance MIMCAP Structure Using a Novel High k Material
Jamison, Paul C., Massey, John, Ando, Takashi, Cartier, Eduard A., Jagannathan, Hemanth, Chen, P. J., Liu, Eric, Romero, Alex, Naczas, Sebastian, Narayanan, Vijay, Pancharatnam, Shanti, Restle, Phillip, Rubin, Joshua, Loubet, Nicolas J, Choi, Kisik
Published in ECS transactions (24.04.2020)
Published in ECS transactions (24.04.2020)
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Journal Article
Performance dependence of CMOS on silicon substrate orientation for ultrathin oxynitride and HfO2 gate dielectrics
Min Yang, Gusev, E.P., Meikei Ieong, Gluschenkov, O., Boyd, D.C., Chan, K.K., Kozlowski, P.M., D'Emic, C.P., Sicina, R.M., Jamison, P.C., Chou, A.I.
Published in IEEE electron device letters (01.05.2003)
Published in IEEE electron device letters (01.05.2003)
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Journal Article
Multilayer dielectric for metal-insulator-metal capacitor (MIMCAP) capacitance and leakage improvement
Jagannathan, Hemanth, Jamison, Paul C, Cartier, Eduard A, Ando, Takashi
Year of Publication 05.01.2021
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Year of Publication 05.01.2021
Patent
Method for controlling the forming voltage in resistive random access memory devices
Consiglio, Steven, Narayanan, Vijay, Tsunomura, Takaaki, Wajda, Cory, Jamison, Paul C, Hopstaken, Marinus J. P, Tapily, Kandabara, Cartier, Eduard A, Ando, Takashi
Year of Publication 11.07.2023
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Year of Publication 11.07.2023
Patent
Surface area enhancement for stacked metal-insulator-metal (MIM) capacitor
Narayanan, Vijay, Jagannathan, Hemanth, Jamison, Paul C, Cartier, Eduard A, Ando, Takashi
Year of Publication 14.09.2021
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Year of Publication 14.09.2021
Patent