Coil and coil support for generating a plasma
GOPALRAJA PRABURAM, DELAURENTIS LEIF ERIC, LAU ALLEN K, VAN GOGH JAMES, PANCHAM IAN A, ROSENSTEIN MICHAEL
Year of Publication 24.06.2004
Get full text
Year of Publication 24.06.2004
Patent
Coil and coil support for generating a plasma
Pancham, Ian, Rosenstein, Michael, DeLaurentis, Leif, Lau, Allen, Gopalraja, Praburam, Van Gogh, James
Year of Publication 24.06.2004
Get full text
Year of Publication 24.06.2004
Patent
Target sidewall design to particle generation during magnetron sputtering and method for manufacturing
GOGH, JAMES VAN, THOMPSON, JIM, LIU, ALAN, SCHWEITZER, MARC, TANAKA, YOICHIRO
Year of Publication 01.12.2002
Get full text
Year of Publication 01.12.2002
Patent
Method and apparatus for controlling darkspace gap in a chamber
Liu, Alan, Schweitzer, Marc, Van Gogh, James, Rosenstein, Michael, Watia, Jennifer, Zhang, Xinyu, Tanaka, Yoichiro, Forster, John, Chan, Anthony
Year of Publication 16.12.2004
Get full text
Year of Publication 16.12.2004
Patent
Method and apparatus for controlling darkspace gap in a chamber
SCHWEITZER MARC O, LIU ALAN BARRY, TANAKA YOICHIRO, ZHANG XINYU, VAN GOGH JAMES STEPHEN, WATIA JENNIFER L, CHEN ANTHONY, FORSTER JOHN C, ROSENSTEIN MICHAEL
Year of Publication 29.08.2006
Get full text
Year of Publication 29.08.2006
Patent
Sputter magnetron having two rotation diameters
FU JIANMING, DELAURENTIS LEIF ERIC, VAN GOGH JAMES, LIU ALAN, ROSENSTEIN MICHAEL
Year of Publication 08.05.2001
Get full text
Year of Publication 08.05.2001
Patent
Target for a physical vapor deposition system
LLOYD, MARK, VAN GOGH, JAMES, DORLEANS, FERNAND, TANG, HOWARD, YANG, SIYAUN, WEST, R. STEVE, HAGERTY, CHRISTOPHER
Year of Publication 20.09.2000
Get full text
Year of Publication 20.09.2000
Patent
Method and apparatus for controlling darkspace gap in a chamber
SCHWEITZER MARC O, LIU ALAN BARRY, TANAKA YOICHIRO, ZHANG XINYU, VAN GOGH JAMES STEPHEN, WATIA JENNIFER L, CHAN ANTHONY, FORSTER JOHN C, ROSENSTEIN MICHAEL
Year of Publication 16.12.2004
Get full text
Year of Publication 16.12.2004
Patent
SPUTTER MAGNETRON HAVING TWO ROTATION DIAMETERS
JIANMING FU, MICHAEL ROSENSTEIN, ALAN LIU, LEIF ERIC DE LAURENTIS, JAMES VAN GOGH
Year of Publication 23.07.2002
Get full text
Year of Publication 23.07.2002
Patent
Sputter magnetron having two rotation diameters
FU, JIANMING, LIU, ALAN, VAN GOGH, JAMES, DE LAURENTIS, LEIF ERIC, ROSENSTEIN, MICHAEL
Year of Publication 21.03.2002
Get full text
Year of Publication 21.03.2002
Patent