ABRASIVE CONSTRUCTION FOR SEMICONDUCTOR WAFER MODIFICATION
RUTHERFORD, DENISE, R, BUHLER, JAMES, D, GOETZ, DOUGLAS, P, HOLLYWOOD, WILLIAM, J, BRUXVOORT, WESLEY, J, THOMAS, CRISTINA, U, WEBB, RICHARD, J
Year of Publication 05.06.2002
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Year of Publication 05.06.2002
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Abrasive construction for semiconductor wafer modification
BUHLER; JAMES D, THOMAS; CRISTINA U, BRUXVOORT; WESLEY J, RUTHERFORD; DENISE R, GOETZ; DOUGLAS P, WEBB; RICHARD J, HOLLYWOOD; WILLIAM J
Year of Publication 28.12.1999
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Year of Publication 28.12.1999
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Apparatus for chemical mechanical polishing
BUHLER; JAMES D, HOSHIZAKI; JON A, HOLLYWOOD; WILLIAM K, LEE; LAWRENCE L, REICHEL; CHARLES A, DE GEUS; RICHARD, WILLIAMS; ROGER O
Year of Publication 17.08.1999
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Year of Publication 17.08.1999
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ABRASIVE CONSTRUCTION FOR SEMICONDUCTOR WAFER MODIFICATION
RUTHERFORD, DENISE, R, BUHLER, JAMES, D, GOETZ, DOUGLAS, P, HOLLYWOOD, WILLIAM, J, BRUXVOORT, WESLEY, J, THOMAS, CRISTINA, U, WEBB, RICHARD, J
Year of Publication 16.06.1999
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Year of Publication 16.06.1999
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Apparatus for chemical mechanical polishing
BUHLER; JAMES D, HOSHIZAKI; JON A, HOLLYWOOD; WILLIAM K, LEE; LAWRENCE L, REICHEL; CHARLES A, DE GEUS; RICHARD, WILLIAMS; ROGER O
Year of Publication 01.06.1999
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Year of Publication 01.06.1999
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Method for chemical mechanical polishing
BUHLER; JAMES D, HOSHIZAKI; JON A, HOLLYWOOD; WILLIAM K, LEE; LAWRENCE L, REICHEL; CHARLES A, DE GEUS; RICHARD, WILLIAMS; ROGER O
Year of Publication 02.06.1998
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Year of Publication 02.06.1998
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Abrasive construction for semiconductor wafer modification
DOUGLAS P. GOETZ, WESLEY J BRUXVOORT, JAMES D. BUHLER, RICHARD J WEBB, CRISTINA U. THOMAS, DENISE R RUTHERFORD, WILLIAM J. HOLLYWOOD
Year of Publication 06.03.1998
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Year of Publication 06.03.1998
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ABRASIVE CONSTRUCTION FOR SEMICONDUCTOR WAFER MODIFICATION
BRUXVOORT, WESLEY J, HOLLYWOOD, WILLIAM J, GOETZ, DOUGLAS P, RUTHERFORD, DENISE R, BUHLER, JAMES D, THOMAS, CRISTINA U, WEBB, RICHARD J
Year of Publication 19.02.1998
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Year of Publication 19.02.1998
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ABRASIVE CONSTRUCTION FOR SEMICONDUCTOR WAFER MODIFICATION
RUTHERFORD, DENISE, R, BUHLER, JAMES, D, GOETZ, DOUGLAS, P, HOLLYWOOD, WILLIAM, J, BRUXVOORT, WESLEY, J, THOMAS, CRISTINA, U, WEBB, RICHARD, J
Year of Publication 19.02.1998
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Year of Publication 19.02.1998
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Abrasive construction for semiconductor wafer modification
BUHLER; JAMES D, THOMAS; CRISTINA U, BRUXVOORT; WESLEY J, RUTHERFORD; DENISE R, GOETZ; DOUGLAS P, WEBB; RICHARD J, HOLLYWOOD; WILLIAM J
Year of Publication 02.12.1997
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Year of Publication 02.12.1997
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Improved method and apparatus for chemical mechanical polish ing
JON A. HOSHIZAKI, JAMES D. BUHLER, RICHARD DE GEUS, CHARLES A. REICHEL, WILLIAM K. HOLLYWOOD, ROGER O. WILLIAMS, LAWRENCE L. LEE
Year of Publication 29.11.1996
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Year of Publication 29.11.1996
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IMPROVED METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING
LEE, LAWRENCE, L, DE GEUS, RICHARD, BUHLER, JAMES, D, REICHEL, CHARLES, A, HOLLYWOOD, WILLIAM, K, HOSHIZAKI, JON, A, WILLIAMS, ROGER, O
Year of Publication 21.11.1996
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Year of Publication 21.11.1996
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Improved method and apparatus for chemical mechanical polishing
JON A. HOSHIZAKI, JAMES D. BUHLER, RICHARD DE GEUS, CHARLES A. REICHEL, WILLIAM K. HOLLYWOOD, ROGER O. WILLIAMS, LAWRENCE L. LEE
Year of Publication 11.08.1998
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Year of Publication 11.08.1998
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