Interface optimization for poly silicon/tungsten gates
Schmidbauer, Sven, Hahn, Jens, Buerke, Axel, Jakubowski, Frank, Storbeck, Olaf, Ting, Yu-Wei, Schuster, Thomas, Faul, Jürgen
Published in Microelectronic engineering (01.10.2008)
Published in Microelectronic engineering (01.10.2008)
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