Atomic and Molecular Layer Deposition Area Selective Deposition using alternate deposition and etch super-cycle strategies
Bonvalot, Marceline, Vallee, Christophe, Mannequin, Cedric, Jaffal, Moustapha, Gassilloud, Remy, Posseme, Nicolas, Chevolleau, Thierry
Published in Dalton transactions : an international journal of inorganic chemistry (16.11.2021)
Published in Dalton transactions : an international journal of inorganic chemistry (16.11.2021)
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Journal Article
Area selective deposition using alternate deposition and etch super-cycle strategies
Bonvalot, Marceline, Vallée, Christophe, Mannequin, Cédric, Jaffal, Moustapha, Gassilloud, Rémy, Possémé, Nicolas, Chevolleau, Thierry
Published in Dalton transactions : an international journal of inorganic chemistry (04.01.2022)
Published in Dalton transactions : an international journal of inorganic chemistry (04.01.2022)
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Journal Article
Atmospheric Plasma-Enhanced Spatial Chemical Vapor Deposition of SiO2 Using Trivinylmethoxysilane and Oxygen Plasma
Nguyen, Viet Huong, Sekkat, Abderrahime, Masse de la Huerta, César Arturo, Zoubian, Fadi, Crivello, Chiara, Rubio-Zuazo, Juan, Jaffal, Moustapha, Bonvalot, Marceline, Vallée, Christophe, Aubry, Olivier, Rabat, Hervé, Hong, Dunpin, Muñoz-Rojas, David
Published in Chemistry of materials (23.06.2020)
Published in Chemistry of materials (23.06.2020)
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Journal Article
Atmospheric Plasma-Enhanced Spatial Chemical Vapor Deposition of SiO 2 Using Trivinylmethoxysilane and Oxygen Plasma
Nguyen, Viet Huong, Sekkat, Abderrahime, Masse de la Huerta, César Arturo, Zoubian, Fadi, Crivello, Chiara, Rubio-Zuazo, Juan, Jaffal, Moustapha, Bonvalot, Marceline, Vallée, Christophe, Aubry, Olivier, Rabat, Hervé, Hong, Dunpin, Muñoz-Rojas, David
Published in Chemistry of materials (23.06.2020)
Published in Chemistry of materials (23.06.2020)
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