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Year of Publication 23.07.2020
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CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS AND METHODS FOR CONTROLLING A TEMPERATURE OF AN OBJECT HELD BY A CLAMP OF A LITHOGRAPHIC APPARATUS
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Year of Publication 08.11.2018
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Cooling apparatus and plasma-cleaning station for cooling apparatus
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Year of Publication 21.06.2024
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Cooling apparatus and plasma-cleaning station for cooling apparatus
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Year of Publication 08.01.2019
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Year of Publication 21.06.2018
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CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS AND METHODS FOR CONTROLLING A TEMPERATURE OF AN OBJECT HELD BY A CLAMP OF A LITHOGRAPHIC APPARATUS
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Year of Publication 13.04.2017
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CHUCKS AND CLAMPS FOR HOLDING OBJECTS OF A LITHOGRAPHIC APPARATUS AND METHODS FOR CONTROLLING A TEMPERATURE OF AN OBJECT HELD BY A CLAMP OF A LITHOGRAPHIC APPARATUS
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Year of Publication 11.04.2017
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Year of Publication 01.10.2022
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Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
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Year of Publication 11.07.2021
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Year of Publication 11.07.2021
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