A new titanium salicide process (DIET) for sub-quarter micron CMOS
Horiuchi, T., Wakabayashi, H., Iskigami, T., Nakamura, H., Mogami, T., Kunio, T., Okumura, K.
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
Published in Proceedings of 1994 VLSI Technology Symposium (1994)
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