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Year of Publication 01.04.2016
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Year of Publication 22.02.2017
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Year of Publication 15.02.2017
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Year of Publication 26.10.2016
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Year of Publication 08.06.2016
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Year of Publication 08.06.2016
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Substrate features for inductive monitoring of conductive trench depth
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Year of Publication 16.03.2016
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Year of Publication 16.03.2016
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Inductive monitoring of conductive trench depth
LU, WEI, SWEDEK, BOGUSLAW A, WANG, ZHI-HONG, TU, WENIANG, BENVEGNU, DOMINIC J, CARLSSON, INGEMAR, IRAVANI, HASSAN G, WANG, ZHE-FU
Year of Publication 16.01.2016
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Year of Publication 16.01.2016
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Determination of gain for eddy current sensor
SWEDEK, BOGUSLAW A, XU, KUN, BENNETT, DOYLE E, TU, WENIANG, LIU, TZU-YU, CARLSSON, INGEMAR, SHEN, SHIH-HAUR, IRAVANI, HASSAN G
Year of Publication 16.09.2015
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Year of Publication 16.09.2015
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Adjusting eddy current measurements
SWEDEK, BOGUSLAW A, XU, KUN, BENNETT, DOYLE E, TU, WENIANG, LIU, TZU-YU, CARLSSON, INGEMAR, SHEN, SHIH-HAUR, IRAVANI, HASSAN G
Year of Publication 16.09.2015
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Year of Publication 16.09.2015
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In-situ monitoring system with monitoring of elongated region
SWEDEK, BOGUSLAW A, XU, KUN, BENNETT, DOYLE E, TU, WENIANG, LIU, TZU-YU, CARLSSON, INGEMAR, SHEN, SHIH-HAUR, IRAVANI, HASSAN G
Year of Publication 16.06.2014
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Year of Publication 16.06.2014
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High sensitivity real time profile control eddy current monitoring system
SWEDEK, BOGUSLAW A, XU, KUN, TU, WENIANG, WANG, YUCHUN, IRAVANI, HASSAN G
Year of Publication 16.01.2012
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Year of Publication 16.01.2012
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High sensitivity eddy current monitoring system
SWEDEK, BOGUSLAW A, XU, KUN, TU, WENIANG, CARLSSON, INGEMAR, SHEN, SHIH-HAUR, IRAVANI, HASSAN G
Year of Publication 16.02.2013
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Year of Publication 16.02.2013
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High sensitivity real time profile control eddy current monitoring system
SWEDEK, BOGUSLAW A, XU, KUN, TU, WENIANG, WANG, YUCHUN, IRAVANI, HASSAN G
Year of Publication 16.11.2011
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Year of Publication 16.11.2011
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Eddy current monitoring of metal residue or metal pillars
SWEDEK, BOGUSLAW A, GAGE, DAVID MAXWELL, XU, KUN, TU, WENIANG, CARLSSON, INGEMAR, SHEN, SHIH-HAUR, IRAVANI, HASSAN G, WANG, JAMES C
Year of Publication 16.12.2012
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Year of Publication 16.12.2012
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