Substrate features for inductive monitoring of conductive trench depth
Iravani Hassan G, Wang Zhefu, Swedek Boguslaw A, Redeker Fred C, McClintock William H, Lu Wei, Tu Wen-Chiang, Wang Zhihong
Year of Publication 06.03.2018
Get full text
Year of Publication 06.03.2018
Patent
Eddy current monitoring for detecting vibrations in polishing
OH JEONGHOON, HIGASHI, PATRICK, A, WU ERIC T, LAI CHRISTOPHER, IRAVANI HASSAN G, CUI NINGZHUO, LEE HARRY Q, XU KUN, WU HAOSHENG, QIAN JUN
Year of Publication 19.09.2023
Get full text
Year of Publication 19.09.2023
Patent
Eddy current monitoring to detect vibration in polishing
CUI, NING-ZHUO, LAI, CHRISTOPHER, XU, KUN, LEE, HARRY Q, QIAN, JUN, HIGASHI, PATRICK A, WU, HAO-SHENG, IRAVANI, HASSAN G, WU, ERIC T, OH, JEONGHOON
Year of Publication 16.09.2023
Get full text
Year of Publication 16.09.2023
Patent
Adjusting eddy current measurements
Liu Tzu-Yu, Iravani Hassan G, Xu Kun, Swedek Boguslaw A, Carlsson Ingemar, Bennett Doyle E, Shen Shih-Haur, Tu Wen-Chiang
Year of Publication 02.05.2017
Get full text
Year of Publication 02.05.2017
Patent
ADJUSTING EDDY CURRENT MEASUREMENTS
XU, Kun, TU, Wen-Chiang, LIU, Tzu-Yu, SWEDEK, Boguslaw A, BENNETT, Doyle E, SHEN, Shih-Haur, IRAVANI, Hassan G, CARLSSON, Ingemar
Year of Publication 29.09.2016
Get full text
Year of Publication 29.09.2016
Patent
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
SWEDEK BOGUSLAW A, BENNETT DOYLE E, IRAVANI HASSAN G, LIU TZU-YU, TU WENIANG, SHEN SHIH-HAUR, XU KUN, CARLSSON INGEMAR
Year of Publication 09.06.2016
Get full text
Year of Publication 09.06.2016
Patent
High sensitivity eddy current monitoring system
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, TU WENIANG, SHEN SHIH-HAUR, XU KUN, CARLSSON INGEMAR
Year of Publication 05.05.2015
Get full text
Year of Publication 05.05.2015
Patent
CORE CONFIGURATION FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING SYSTEM
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, SHEN SHIH-HAUR, IVANOV DENIS, XU KUN
Year of Publication 18.06.2019
Get full text
Year of Publication 18.06.2019
Patent
Determination of gain for eddy current sensor
SWEDEK BOGUSLAW A, BENNETT DOYLE E, IRAVANI HASSAN G, LIU TZU-YU, TU WENIANG, SHEN SHIH-HAUR, XU KUN, CARLSSON INGEMAR
Year of Publication 08.03.2016
Get full text
Year of Publication 08.03.2016
Patent
Determination of gain for eddy current sensor
SWEDEK BOGUSLAW A, BENNETT DOYLE E, IRAVANI HASSAN G, LIU TZU-YU, TU WENIANG, SHEN SHIH-HAUR, XU KUN, CARLSSON INGEMAR
Year of Publication 01.03.2016
Get full text
Year of Publication 01.03.2016
Patent
INDUCTIVE MONITORING OF CONDUCTIVE TRENCH DEPTH
LU, WEI, SWEDEK, BOGUSLAW A, TU, WENIANG, WANG, ZHEFU, BENVEGNU, DOMINIC J, CARLSSON, INGEMAR, WANG, ZHIHONG, IRAVANI, HASSAN G
Year of Publication 30.12.2015
Get full text
Year of Publication 30.12.2015
Patent
SUBSTRATE FEATURES FOR INDUCTIVE MONITORING OF CONDUCTIVE TRENCH DEPTH
REDEKER, FRED C, LU, WEI, SWEDEK, BOGUSLAW A, MCCLINTOCK, WILLIAM H, TU, WENIANG, WANG, ZHEFU, WANG, ZHIHONG, IRAVANI, HASSAN G
Year of Publication 30.12.2015
Get full text
Year of Publication 30.12.2015
Patent
INDUCTIVE MONITORING OF CONDUCTIVE TRENCH DEPTH
LU WEI, SWEDEK BOGUSLAW A, WANG ZHEFU, WANG ZHIHONG, IRAVANI HASSAN G, BENVEGNU DOMINIC J, TU WENIANG, CARLSSON INGEMAR
Year of Publication 24.12.2015
Get full text
Year of Publication 24.12.2015
Patent
SUBSTRATE FEATURES FOR INDUCTIVE MONITORING OF CONDUCTIVE TRENCH DEPTH
LU WEI, SWEDEK BOGUSLAW A, WANG ZHIHONG, WANG ZHEFU, IRAVANI HASSAN G, TU WENIANG, REDEKER FRED C, MCCLINTOCK WILLIAM H
Year of Publication 24.12.2015
Get full text
Year of Publication 24.12.2015
Patent
In-situ monitoring system with monitoring of elongated region
SWEDEK BOGUSLAW A, BENNETT DOYLE E, LIU TZU-YU, IRAVANI HASSAN G, TU WENIANG, SHEN SHIH-HAUR, XU KUN, CARLSSON INGEMAR
Year of Publication 08.12.2015
Get full text
Year of Publication 08.12.2015
Patent
POLISHING APPARATUS USING NEURAL NETWORK FOR MONITORING
SWEDEK BOGUSLAW A, IRAVANI HASSAN G, CHERIAN BENJAMIN, SHEN SHIH-HAUR, IVANOV DENIS, LEE HARRY Q, XU KUN
Year of Publication 03.12.2019
Get full text
Year of Publication 03.12.2019
Patent
ADJUSTING EDDY CURRENT MEASUREMENTS
SWEDEK, BOGUSLAW A, XU, KUN, BENNETT, DOYLE E, TU, WENIANG, LIU, TZU-YU, CARLSSON, INGEMAR, SHEN, SHIH-HAUR, IRAVANI, HASSAN G
Year of Publication 20.08.2015
Get full text
Year of Publication 20.08.2015
Patent