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New DUV resist characterisation: stability to MB SEMI © F21-95 contaminants
by
Curro, T.
,
Cordiano, F.
,
Franco, G.
,
Mondio, G.
,
Ippedico
,
G
.
Published in
Materials science & engineering. B, Solid-state materials for advanced technology
(15.12.2004)
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Journal Article
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engineering
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physics
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amc
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chemically amplified resists
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duv resist
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materials science
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materials science, multidisciplinary
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physical sciences
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